Display substrate and manufacturing method thereof, display device

ABSTRACT

A display substrate and manufacturing method thereof, and a display device are provided. The display substrate includes a base substrate, and a shift register unit and a first clock signal line that are on the base substrate, the first clock signal line extends along a first direction on the base substrate and is configured to provide a first clock signal to the shift register unit, the shift register unit includes an input circuit, an output circuit, a first control circuit and an output control circuit, and the first control circuit includes a first control transistor and a second control transistor, an active layer of the first control transistor and an active layer of the second control transistor are a continuous control semiconductor layer, the control semiconductor layer extends along the first direction.

TECHNICAL FIELD

At least one embodiment of the present disclosure relates to a displaysubstrate and a manufacturing method thereof, and a display device.

BACKGROUND

In the field of display technology, a pixel array such as a liquidcrystal display panel or an Organic Light-emitting Diode, OLED displaypanel usually includes a plurality of rows of gate lines and a pluralityof columns of data lines interlaced with the gate lines. The driving ofthe gate line can be realized by a bonded integrated driving circuit. Inrecent years, with the continuous improvement of the preparationtechnology of amorphous silicon thin film transistors or oxide thin filmtransistors, the gate driving circuit may be directly integrated on athin film transistor array substrate to form a GOA (Gate driver OnArray) to drive the gate lines. For example, a GOA including a pluralityof cascaded shift register units may be used to provide switchingvoltage signals (scanning signals) for the plurality of rows of gatelines of the pixel array, so as to control the plurality of rows of gatelines to be turn on in sequence, and at the same time, data signals areprovided to pixel units in corresponding rows in the pixel array by thedata lines, so that gray voltages required for displaying various grayscales of an image are formed in each pixel unit, and then a frame ofimage is displayed.

SUMMARY

At least one embodiment of the present disclosure provides a displaysubstrate, comprising: a base substrate, and a shift register unit and afirst clock signal line that are on the base substrate; the first clocksignal line extends along a first direction on the base substrate and isconfigured to provide a first clock signal to the shift register unit;the shift register unit comprises an input circuit, an output circuit, afirst control circuit and an output control circuit; the input circuitis configured to input an input signal to a first node in response tothe first clock signal; the output circuit is configured to output anoutput signal to an output terminal; the first control circuit isconfigured to control a level of a second node in response to a level ofthe first node and the first clock signal; the output control circuit isconfigured to control a level of the output terminal under control ofthe level of the second node; the first control circuit comprises afirst control transistor and a second control transistor, an activelayer of the first control transistor and an active layer of the secondcontrol transistor are a continuous control semiconductor layer, thecontrol semiconductor layer extends along the first direction, and agate electrode of the first control transistor and a gate electrode ofthe second control transistor extend along a second direction differentfrom the first direction and are arranged side by side in the firstdirection.

For example, in the display substrate provided by at least an embodimentof the present disclosure, an included angle between the first directionand the second direction ranges from 70 degrees and 90 degrees.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises avoltage stabilization circuit, the voltage stabilization circuit isconnected to the first node and a third node, and is configured tostabilize a level of the third node; the output circuit is connected tothe third node, and is configured to output the output signal to theoutput terminal under control of the level of the third node.

For example, the display substrate provided by at least an embodiment ofthe present disclosure, further comprises a first power line and asecond power line that are configured to respectively supply a firstvoltage and a second voltage to the shift register unit; the voltagestabilization circuit comprises a voltage stabilization transistor, thesecond power line comprises a protrusion portion protruding in thesecond direction; a second electrode of the second control transistorand a gate electrode of the voltage stabilization transistor are bothconnected to the protrusion portion of the second power line to receivethe second voltage; and a first electrode of the voltage stabilizationtransistor is connected to the third node, and a second electrode of thevoltage stabilization transistor is connected to the first node.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the input circuit comprises an inputtransistor, and an active layer of the input transistor is in a stripshape extending along the second direction; the input transistorcomprises a first gate electrode, a second gate electrode and aconnection electrode connecting the first gate electrode and the secondgate electrode; and the connection electrode comprises a first partwhich is connected to the first gate electrode and extends along thefirst direction, a second part connected to the second gate electrode,and a third part which extends along the second direction and isconnected to the first part and the second part, and the third part ofthe connection electrode is connected to the first clock signal line toreceive the first clock signal.

For example, in the display substrate provided by at least an embodimentof the present disclosure, an active layer of the first controltransistor, an active layer of the second control transistor and anactive layer of the input transistor are arranged side by side in thesecond direction.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the active layer of the first controltransistor and the active layer of the second control transistor are onan imaginary line on which the active layer of the input transistorextends along the second direction.

For example, in the display substrate provided by at least an embodimentof the present disclosure, a first electrode of the input transistor isconnected to a signal input electrode through a first connection wireextending along the second direction to receive the input signal.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises awire transfer electrode; the first electrode of the input transistor iselectrically connected to a first end of the wire transfer electrode,the wire transfer electrode is in a different layer from the activelayer of the input transistor, and a second end of the wire transferelectrode is connected to a first end of the first connection wire, thewire transfer electrode is in a different layer from the firstconnection wire, a second end of the first connection wire iselectrically connected to the signal input electrode, and the wiretransfer electrode is in a same layer as the signal input electrode.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises afirst insulation layer, a second insulation layer, and a thirdinsulation layer; the first insulation layer is between the active layerof the input transistor and the first connection wire, and the secondinsulation layer and third insulation layer are between the firstconnection wire and the wire transfer electrode; and the first electrodeof the input transistor is in a same layer as the wire transferelectrode, and the second end of the wire transfer electrode isconnected to the first end of the first connection wire through a viahole penetrating the second insulation layer and the third insulationlayer, and the second end of the first connection wire is electricallyconnected to the signal input electrode through a via hole penetratingthe second insulation layer and the third insulation layer.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the display substrate further comprises asecond clock signal line configured to provide a second clock signal tothe shift register unit, and the shift register unit further comprises asecond control circuit; and the second control circuit is connected tothe first node and the second node, and is configured to control thelevel of the first node under control of the level of the second nodeand the second clock signal.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the second control circuit comprises a firstnoise reduction transistor and a second noise reduction transistor; anactive layer of the first noise reduction transistor and an active layerof the second noise reduction transistor are a continuous noisereduction semiconductor layer, and the noise reduction semiconductorlayer extends along the first direction and is arranged side by sidewith the active layer of the input transistor in the first direction; agate electrode of the first noise reduction transistor and a gateelectrode of the second noise reduction transistor extend along thesecond direction and are arranged side by side in the first direction;and the first electrode of the input transistor is connected to thefirst node, and the gate electrode of the first noise reductiontransistor is connected to the second node.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the active layer of the input transistor ison an imaginary line on which the active layer of the first noisereduction transistor and the active layer of the second noise reductiontransistor extend along the first direction.

For example, in the display substrate provided by at least an embodimentof the present disclosure, in a case where the shift register unitcomprises a voltage stabilization transistor, an orthographic projectionof an active layer of the voltage stabilization transistor on the basesubstrate is between an orthographic projection of the active layer ofthe second control transistor on the base substrate and an orthographicprojection of the active layer of the second noise reduction transistoron the base substrate in the first direction.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the gate electrode of the second noisereduction transistor is electrically connected to the second clocksignal line through a third connection wire, the third connection wirecomprises a third sub-connection wire and a fourth sub-connection wire,the third sub-connection wire is connected to the gate electrode of thesecond noise reduction transistor and extends along the first direction,an orthographic projection of the third sub-connection wire on the basesubstrate and an orthographic projection of the active layer of thesecond noise reduction transistor on the base substrate are arrangedside by side in the second direction, the fourth sub-connection wire isconnected to the third sub-connection wire and the second clock signalline and extends along the second direction, and an orthographicprojection of the fourth sub-connection wire on the base substrate is ata side of an orthographic projection of the active layer of the secondnoise reduction transistor on the base substrate away from anorthographic projection of the of the active layer of the first noisereduction transistor on the base substrate.

For example, the display substrate provided by at least an embodiment ofthe present disclosure, further comprises a fourth connection wire, afirst insulation layer, a second insulation layer, and a thirdinsulation layer; the first insulation layer is between the active layerof the input transistor and a gate electrode of the input transistor,and the second insulation layer and third insulation layer are betweenthe gate electrode of the input transistor and the fourth connectionwire; and the third sub-connection wire and the fourth sub-connectionwire are integral, and the third sub-connection wire is connected to thefourth connection wire through a via hole penetrating the secondinsulation layer and the third insulation layer.

For example, the display substrate provided by at least an embodiment ofthe present disclosure, further comprises a fourth connection wire, afirst insulation layer, a second insulation layer, and a thirdinsulation layer; the first insulation layer is between the active layerof the input transistor and a gate electrode of the input transistor,and the second insulation layer and third insulation layer are betweenthe gate electrode of the input transistor and the fourth connectionwire; and the third sub-connection wire is connected to the fourthconnection wire through a via hole penetrating the second insulationlayer and third insulation layer, and the fourth sub-connection wire isconnected to the fourth connection wire through a via hole penetratingthe second insulation layer and third insulation layer.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises anintermediate transfer electrode; the active layer of the first controltransistor and the active layer of the second control transistor arearranged side by side with the active layer of the first noise reductiontransistor and the active layer of the second noise reduction transistorin the second direction; an orthographic projection of the intermediatetransfer electrode on the base substrate is between a whole of anorthographic projection of the active layer of the first controltransistor on the base substrate and an orthographic projection of theactive layer of the second control transistor on the base substrate anda whole of an orthographic projection of the active layer of the firstnoise reduction transistor on the base substrate and an orthographicprojection of the active layer of the second noise reduction transistoron the base substrate; and the gate electrode of the first noisereduction transistor is connected to a first electrode of the firstcontrol transistor and a first electrode of the second controltransistor through the intermediate transfer electrode.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the second node comprises the intermediatetransfer electrode.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises afirst insulation layer and a second insulation layer; the firstinsulation layer is between the active layer of the first noisereduction transistor and the gate electrode of the first noise reductiontransistor in a direction perpendicular to the base substrate; thesecond insulation layer is between the gate electrode of the first noisereduction transistor and the intermediate transfer electrode in thedirection perpendicular to the base substrate; the gate electrode of thefirst noise reduction transistor is connected to a first end of theintermediate transfer electrode through a via hole penetrating thesecond insulation layer; and the first electrode of the first controltransistor and the first electrode of the second control transistor areconnected to a second end of the intermediate transfer electrode and ina same layer as the intermediate transfer electrode.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the second node comprises the intermediatetransfer electrode.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the shift register unit further comprises afirst insulation layer, a second insulation layer, a third insulationlayer, and a second connection wire; the first insulation layer isbetween the active layer of the first noise reduction transistor and thegate electrode of the first noise reduction transistor in a directionperpendicular to the base substrate; the second insulation layer isbetween the gate electrode of the first noise reduction transistor andthe intermediate transfer electrode in the direction perpendicular tothe base substrate; the third insulation layer is between theintermediate transfer electrode and the second connection wire in thedirection perpendicular to the base substrate, and the second connectionwire comprises a first sub-connection wire and a second sub-connectionwire; the gate electrode of the first noise reduction transistor isconnected to the first sub-connection wire through a via holepenetrating the second insulation layer and the third insulation layer,and a first end of the intermediate transfer electrode is connected tothe first sub-connection wire through a via hole penetrating the thirdinsulation layer; and the first electrode of the first controltransistor and the first electrode of the second control transistor areconnected to the second sub-connection wire and are in a same layer asthe second sub-connection wire, and a second end of the intermediatetransfer electrode is connected to the second sub-connection wirethrough a via hole penetrating the third insulation layer.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the second node comprises the intermediatetransfer electrode and the second connection wire.

For example, in the display substrate provided by at least an embodimentof the present disclosure, a first electrode of the input transistor isconnected to a signal input electrode to receive the input signal; theoutput control circuit comprises an output control transistor and afirst capacitor; and a first electrode of the first capacitor and asecond electrode of the first capacitor respectively comprise a notch,and an orthographic projection of the signal input electrode on the basesubstrate is within an orthographic projection of the notch the firstcapacitor on the base substrate.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the output circuit comprises an outputtransistor and a second capacitor, a first electrode of the outputtransistor is connected to the fourth connection wire, and the fourthconnection wire is connected to the second clock signal line through thethird connection wire, and an orthographic projection of the thirdsub-connection wire of the third connection wire on the base substrateis on a side of the orthographic projection of the active layer of thesecond noise reduction transistor on the base substrate close to anorthographic projection of an active layer of the output transistor onthe base substrate.

For example, in the display substrate provided by at least an embodimentof the present disclosure, a shape of the second capacitor is arectangle.

For example, in the display substrate provided by at least an embodimentof the present disclosure, in a case where the output control circuitcomprises an output control transistor and a first capacitor, an activelayer of the output control transistor and the active layer of theoutput transistor are integral and extend along the first direction; agate electrode of the output control transistor and the gate electrodeof the output transistor extend along the second direction and arearranged side by side in the first direction; and in a case where thedisplay substrate comprises a first power line, a first electrode of theoutput control transistor is electrically connected to the first powerline to receive a first voltage.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the second electrode of the output transistoris connected to a signal input electrode of a next stage of shiftregister unit adjacent to the shift register unit.

For example, the display substrate provided by at least an embodiment ofthe present disclosure, further comprises a first power line, a secondpower line, a second clock signal line, a pixel array region and aperipheral region; the first power line and the second power line areconfigured to respectively provide a first voltage and a second voltageto the shift register unit; the second clock signal line is configuredto provide a second clock signal to the shift register unit; the firstpower line, the second power line, the first clock signal line, thesecond clock signal line and the shift register unit are in theperipheral region; orthographic projections of the second power line,the first clock signal line and the second clock signal line on the basesubstrate are on a side of an orthographic projection of the shiftregister unit on the base substrate away from the pixel array region;and an orthographic projection of the first power line on the basesubstrate is on a side of the orthographic projection of the shiftregister unit on the base substrate close to the pixel array region.

For example, the display substrate provided by at least an embodiment ofthe present disclosure, further comprises a first power line, a secondcontrol circuit, a voltage stabilization circuit, a first transferelectrode, a second transfer electrode, and a third transfer electrode;the first power line is configured to provide a first voltage to theshift register unit; the second control circuit is connected to thefirst node and the second node, and is configured to control the levelof the first node under control of the level of the second node and thesecond clock signal; the voltage stabilization circuit is connected tothe first node and the third node, and is configured to stabilize alevel of the third node; the input circuit comprises an inputtransistor, the second control circuit comprises a first noise reductiontransistor and a second noise reduction transistor, the voltagestabilization circuit comprises a voltage stabilization transistor, theoutput control circuit comprises an output control transistor and afirst capacitor, and the output circuit comprises an output transistorand a second capacitor; the first transfer electrode is connected to afirst electrode of the input transistor, a gate electrode of the firstcontrol transistor, a second electrode of the voltage stabilizationtransistor and a first electrode of the second noise reductiontransistor, and the first transfer electrode is in a different layerfrom the gate electrode of the first control transistor; the secondtransfer electrode is connected to a first electrode of the voltagestabilization transistor and a gate electrode of the output transistor,and the second transfer electrode is in a different layer from the gateelectrode of the output transistor; and the third transfer electrode isconnected to a first electrode of the first noise reduction transistorand a first electrode of the output control transistor, and is connectedto the first power line.

For example, in the display substrate provided by at least an embodimentof the present disclosure, the first node comprises the first transferelectrode, and the third node comprises the second transfer electrode.

At least one embodiment of the present disclosure provides a displaydevice, comprising the display substrate provided by any embodiment ofthe present disclosure.

For example, in the display device provided by at least an embodiment ofthe present disclosure, the display device is an organic light-emittingdiode display device.

For example, the display device provided by at least an embodiment ofthe present disclosure further comprises pixel units arranged in anarray, wherein the output signal output by the output circuit of theshift register unit is configured as a gate scanning signal to drive thepixel units to emit light.

At least one embodiment of the present disclosure provides amanufacturing method of the display substrate provided by any embodimentof the present disclosure, and the manufacturing method comprises:providing the base substrate; forming a shift register unit, a firstpower line, a second power line, the first clock signal line and asecond clock signal line on the base substrate, wherein the forming theshift register unit, comprises: sequentially forming a semiconductorlayer, a first insulation layer, a first conductive layer, a secondinsulation layer, a second conductive layer, a third insulation layerand a third conductive layer in a direction perpendicular to the basesubstrate, an active layer of each transistor is in the semiconductorlayer, a gate electrode of each transistor and a first electrode of eachcapacitor are in the first conductive layer, a second electrode of eachcapacitor is in the second conductive layer, and the first power line,the second power line, the first clock signal line, a first electrode ofeach transistor and a second electrode of each transistor are in thethird conductive layer; respective transistors and respective capacitorsare connected to each other and are connected to the first power line,the second power line, the first clock signal line and the second clocksignal line through via holes penetrating the first insulation layer,the second insulation layer or the third insulation layer.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to clearly illustrate the technical solution of the embodimentsof the disclosure, the drawings of the embodiments will be brieflydescribed in the following; it is obvious that the described drawingsare only related to some embodiments of the disclosure and thus are notlimitative of the disclosure.

FIG. 1A is a schematic diagram of an overall circuit architecture of adisplay panel;

FIG. 1B is a circuit diagram of a shift register unit;

FIG. 1C is a signal timing diagram in the case that the shift registerunit shown in FIG. 1B works;

FIG. 1D is a layout schematic diagram of the shift register unit shownin FIG. 1B on a display substrate;

FIG. 2A is a layout schematic diagram of a display substrate provided byat least one embodiment of the present disclosure;

FIG. 2B is a layout schematic diagram of another display substrateprovided by at least one embodiment of the present disclosure;

FIG. 3A, FIG. 4A, FIG. 5A and FIG. 6A respectively show planar views ofwiring layers of the shift register unit of the display substrate asshown in FIG. 2A;

FIG. 3B, FIG. 4B, FIG. 5B, and FIG. 6B respectively show planar views ofwiring layers of the shift register unit of the display substrate asshown in FIG. 2B;

FIG. 5C is a planar view of via holes between the wiring layers of theshift register unit of the display substrate as shown in FIG. 2A;

FIG. 5D is a planar view of via holes between the wiring layers of theshift register unit of the display substrate as shown in FIG. 2B;

FIG. 7A is a cross-sectional view of an example of the display substrateas shown in FIG. 2A;

FIG. 7B is a sectional view of some examples of the display substrate asshown in FIG. 2A taken along a direction A-A′;

FIG. 7C is a sectional view of some examples of the display substrate asshown in FIG. 2B taken along a direction B-B′;

FIG. 7D is a cross-sectional view of some examples of the displaysubstrate as shown in FIG. 2A taken along a direction C-C′;

FIG. 7E is a sectional view of some examples of the display substrate asshown in FIG. 2B taken along a direction D-D′;

FIG. 8 is a schematic diagram of a display device provided by at leastone embodiment of the present disclosure; and

FIG. 9 is a flowchart of a manufacturing method of a display substrateprovided by at least one embodiment of the present disclosure.

DETAILED DESCRIPTION

In order to make objects, technical details and advantages of theembodiments of the disclosure apparent, the technical solutions of theembodiments will be described in a clearly and fully understandable wayin connection with the drawings related to the embodiments of thedisclosure. Apparently, the described embodiments are just a part butnot all of the embodiments of the disclosure. Based on the describedembodiments herein, those skilled in the art can obtain other embodiment(s), without any inventive work, which should be within the scope of thedisclosure.

Unless otherwise defined, all the technical and scientific terms usedherein have the same meanings as commonly understood by one of ordinaryskill in the art to which the present disclosure belongs. The terms“first,” “second,” etc., which are used in the description and theclaims of the present application for disclosure, are not intended toindicate any sequence, amount or importance, but distinguish variouscomponents. Also, the terms “comprise,” “comprising,” “include,”“including,” etc., are intended to specify that the elements or theobjects stated before these terms encompass the elements or the objectsand equivalents thereof listed after these terms, but do not precludethe other elements or objects. The phrases “connect”, “connected”, etc.,are not intended to define a physical connection or mechanicalconnection, but may include an electrical connection, directly orindirectly. “On,” “under,” “left,” “right” and the like are only used toindicate relative position relationship, and when the position of theobject which is described is changed, the relative position relationshipmay be changed accordingly.

The present disclosure is explained by several specific embodiments. Inorder to keep the following description of embodiments of the presentinvention clear and concise, detailed descriptions of known functionsand known components may be omitted. In the case that any component ofan embodiment of the present invention appears in more than one drawing,the component is denoted by the same reference numeral in each drawing.

FIG. 1A is a schematic diagram of an overall circuit architecture of adisplay panel. For example, as shown in FIG. 1A, 101 denotes an overallouter frame line of the display panel; the display panel includes aneffective display region (i.e., a pixel array region) 102 and aperipheral region located around the effective display region 102. Theeffective display region includes pixel units 103 arranged in an array;the peripheral region includes a shift register unit 104, and aplurality of cascaded shift register units 104 constitute a gate drivingcircuit configured to provide, for example, a gate scanning signalshifted row by row to the pixel units 103 arranged in an array in theeffective display region 102 of the display panel 101; the peripheralregion further includes a light-emitting control unit 105, and aplurality of cascaded light-emitting control units 105 constitute alight-emitting control array which is configured to providelight-emitting control signals, for example, shifted row by row, to thepixel units 103 arranged in the array in the effective display region102 of the display panel 101.

As shown in FIG. 1A, a data line D1-DN (N is an integer greater than 1)connected to a data driving chip IC longitudinally passes through theeffective display region 102 to provide a data signal for the pixelunits 103 arranged in an array; gate lines G1-GM (M is an integergreater than 1) connected to the shift register unit 104 and thelight-emitting control unit 105 transversely pass through the effectivedisplay region 102 to provide a gate scanning signal and alight-emitting control signal to the pixel units arranged in an array.For example, each pixel unit 103 may include a pixel circuit and alight-emitting element with a circuit structure such as 7T1C, 8T2C or4T1C in the art. The pixel circuit operates under control of the datasignal transmitted through the data lines and the gate scanning signaland the light-emitting control signal transmitted through the gate linesto drive the light-emitting element to emit light, thereby realizingdisplay and other operations. The light-emitting element may be, forexample, an organic light-emitting diode (OLED) or a quantum dotlight-emitting diode (QLED).

FIG. 1B is a circuit structure diagram of a shift register unit. FIG. 1Cis a signal timing diagram in the case that the shift register unitshown in FIG. 1B works. The working process of the shift register unitis briefly described with reference to FIG. 1B and FIG. 1C.

As shown in FIG. 1B, the shift register unit 104 includes eighttransistors (an input transistor T1, a first control transistor T2, asecond control transistor T3, an output control transistor T4, an outputtransistor T5, a first noise reduction transistor T6, a second noisereduction transistor T7 and a voltage stabilization transistor T8) andtwo capacitors (a first capacitor C1 and a second capacitor C2). Forexample, in the case that a plurality of shift register units 104 arecascaded, a first electrode of the input transistor T1 in a first stageof shift register unit 104 is connected to an input terminal IN, theinput terminal IN is configured to be connected to a trigger signal lineGSTV to receive a trigger signal as an input signal, while a firstelectrode of each input transistor T1 in other stages of shift registerunits 104 is electrically connected to an output terminal of a previousstage of shift register unit 104 to receive an output signal output byan output terminal GOUT of the previous stage of shift register unit 104as an input signal, thereby realizing shift output for performing, forexample, progressive scanning on the array of pixel units in the activedisplay region.

In addition, as shown in FIG. 1B, the shift register unit furtherincludes a first clock signal terminal CK and a second clock signalterminal CB, GCK represents a first sub-clock signal line and GCBrepresents a second sub-clock signal line. For example, in the case thatthe first clock signal terminal CK is connected to the first sub-clocksignal line GCK to receive a first clock signal, the first sub-clocksignal line GCK is a first clock signal line; in the case that the firstclock signal terminal CK is connected to the second sub-clock signalline GCB to receive the first clock signal, the second sub-clock signalline GCB is the first clock signal line, which depends on the specificsituation, and no limitation is imposed to this case in embodiments ofthe present disclosure. The second clock signal terminal CB is connectedto the second sub-clock signal line GCB or the first sub-clock signalline GCK to receive a second clock signal. The case that the first clocksignal terminal CK is connected to the first sub-clock signal line GCKto receive the first clock signal, and the second clock signal terminalCB is connected to the second sub-clock signal line GCB to receive thesecond clock signal is taken as an example. That is, the first sub-clocksignal line GCK is taken as the first clock signal line and the secondsub-clock signal line GCB is taken as the second clock signal line, theembodiments of the present disclosure are not limited to this case. Forexample, the first clock signal GCK and the second clock signal GCB mayadopt a pulse signal with a duty ratio greater than 50%, and thedifference between the first clock signal GCK and the second clocksignal GCB is, for example, half a period; VGH represents a first powerline and a first voltage provided by the first power line, for example,the first voltage is in a DC high level; VGL represents a second powerline and a second voltage provided by the second power line, forexample, the second voltage is in a DC low level and the first voltageis greater than the second voltage; N1, N2 and N3 respectively representa first node, a second node and a third node in the circuit diagram.

As shown in FIG. 1B, a gate electrode of the input transistor T1 isconnected to the first clock signal terminal CK (the first clock signalterminal CK is connected to the first sub-clock signal line GCK) toreceive the first clock signal, a second electrode of the inputtransistor T1 is connected to the input terminal IN, and the firstelectrode of the input transistor T1 is connected to the first node N1.For example, in the case that the shift register unit is a first-stageof shift register unit, the input terminal IN is connected to thetrigger signal line GSTV to receive the trigger signal, and in the casethat the shift register unit is a shift register unit in other stagesexcept the first-stage of shift register unit, the input terminal IN isconnected to the output terminal GOUT of a previous stage of shiftregister unit.

A gate electrode of the first control transistor T2 is connected to thefirst node N1, a second electrode of the first control transistor T2 isconnected to the first clock signal terminal CK to receive the firstclock signal, and a first electrode of the first control transistor T2is connected to the second node N2.

A gate electrode of the second control transistor T3 is connected to thefirst clock signal terminal CK to receive the first clock signal, asecond electrode of the second control transistor T3 is connected to asecond power line VGL to receive a second voltage, and a first electrodeof the second control transistor T3 is connected to the second node N2.

A gate electrode of the output control transistor T4 is connected to thesecond node N2, a first electrode of the output control transistor T4 isconnected to a first power line VGH to receive a first voltage, and asecond electrode of the output control transistor T4 is connected to theoutput terminal GOUT.

A first electrode of the first capacitor is connected to the second nodeN2, and a second electrode of the first capacitor C1 is connected to thefirst power line VGH.

A gate electrode of the output transistor T5 is connected to the thirdnode N3, a first electrode of the output transistor T5 is connected tothe second clock signal terminal CB, and a second electrode of theoutput transistor T5 is connected to the output terminal GOUT.

A first electrode of the second capacitor C2 is connected to the thirdnode N3, and a second electrode of the second capacitor C2 is connectedto the output terminal GOUT.

A gate electrode of the first noise reduction transistor T6 is connectedto the second node N2, a first electrode of the first noise reductiontransistor T6 is connected to the first power line VGH to receive thefirst voltage, and a second electrode of the first noise reductiontransistor T6 is connected to a second electrode of the second noisereduction transistor T7.

A gate electrode of the second noise reduction transistor T7 isconnected to the second clock signal terminal CB (the second clocksignal terminal CB is connected to the second sub-clock signal line GCB)to receive the second clock signal, and a first electrode of the secondnoise reduction transistor T7 is connected to the first node N1.

A gate electrode of the voltage stabilization transistor T8 is connectedto the second power line VGL to receive the second voltage, a secondelectrode of the voltage stabilization transistor T8 is connected to thefirst node N1, and a first electrode of the voltage stabilizationtransistor T8 is connected to the third node N3.

The case that the transistors in the shift register unit 104 shown inFIG. 1B are all P-type transistors is taken as an example, that is, eachtransistor is turned on in the case that the gate electrode is at a lowlevel (turn-on level), and turned off in the case that the gateelectrode is at a high level (turn-off level). In this case, the firstelectrode of each transistor may be a source electrode, and the secondelectrode of each transistor may be a drain electrode.

The shift register unit includes, but is not limited to, theconfiguration shown in FIG. 1B. For example, the transistors in theshift register unit 104 may adopt N-type transistors or a mixture ofP-type transistors and N-type transistors, so long as the port polarityof the selected type of transistor is connected according to the portpolarity of the corresponding transistor in the embodiment of thedisclosure at the same time.

It should be noted that all the transistors adopted in the shiftregister unit may be thin film transistors, field effect transistors orother switching elements with the same characteristics. Here, the casethat all the transistors are thin film transistors is taken as anexample for explanation. For example, the active layer (channel region)of each transistor is made of a semiconductor material, such aspolysilicon (such as low-temperature polysilicon or high-temperaturepolysilicon), amorphous silicon and indium gallium tin oxide (IGZO), andso on, while the gate electrode, the source electrode and the drainelectrode are made of a metal material, such as metallic aluminum oraluminum alloy. The source electrode and the drain electrode of thetransistor adopted here may be symmetrical in structure, so there is nodifference in structure between the source electrode and the drainelectrode. In the embodiments of the present disclosure, in order todistinguish the two electrodes of a transistor except the gateelectrode, it is directly described that one electrode is the firstelectrode and the other electrode is the second electrode. In addition,in the embodiments of the present disclosure, the electrodes of thecapacitor may be metal electrodes or one of the electrodes of thecapacitor is made of a semiconductor material (e.g., doped polysilicon).

FIG. 1C is a signal timing diagram in the case that the shift registerunit 104 shown in FIG. 1B works. The working process of the shiftregister is described in detail with reference to FIG. 1B and FIG. 1C.For example, the working principle of the first stage of shift registerunit 104 is described, and the working principles of the other stages ofshift register units 104 are similar to them, so they are not describedagain. As shown in FIG. 1C, the working process of the shift registerunit 104 includes four stages which are a first phase t1, a second phaset2, a third phase t3 and a fourth phase t4. FIG. 1C shows a timingwaveform of the signals in each phase.

In the first phase t1, as shown in FIG. 1C, the first clock signalterminal CK receives a low-level first clock signal, and the triggersignal line GSTV provides a low-level trigger signal, so the inputtransistor T1 and the second control transistor T3 are turned on, andthe turned-on input transistor t1 transmits the low-level trigger signalto the first node N1, so that the level of the first node N1 becomes alow level, so the first control transistor T2 and the output transistorT5 are turned on. Because the voltage stabilization transistor T8 isalways turned on in response to the second voltage (low level) providedby the second power line VGL, the level of the third node N3 is the sameas the level of the first node N1, i.e., low level, and at the sametime, this low level is stored in the second capacitor C2. In addition,the turned-on second control transistor T3 transmits the low levelsecond voltage VGL to the second node N2, and the turned-on firstcontrol transistor T2 transmits the low level of the first clock signalto the second node N2, so that the level of the second node N2 becomes alow level and is stored in the first capacitor C1, and therefore theoutput control transistor T4 is turned on in response to the low levelof the second node N2, to output the high-level first voltage providedby the first power line VGH to the output terminal GOUT, and at the sametime, the output transistor T5 is turned on in response to the low levelof the third node N3 to transmit the high-level second clock signalreceived by the second clock signal terminal CB to the output terminalGOUT, so that at this phase, the shift register unit outputs a highlevel.

In the second phase t2, as shown in FIG. 1C, the second clock signalterminal CB receives a low-level second clock signal, so that the secondnoise reduction transistor T7 is turned on, and the first clock signalterminal CK receives a high-level first clock signal, and therefore theinput transistor T1 and the second control transistor T3 are turned off.Because of the storage effect of the second capacitor C2, the first nodeN1 can continue to maintain the low level of the previous phase, so thefirst control transistor T2 and the output transistor T5 are turned on.Because the first control transistor T2 is turned on, the high-levelfirst clock signal received by the first clock signal terminal CK istransmitted to the second node N2, so that the second node N2 becomes tobe at a high level. Therefore, the first noise reduction transistor T6and the output control transistor T4 are turned off, thereby preventingthe high level provided by the first power line VGH from being output tothe output terminal GOUT and the first node N1. Meanwhile, because theoutput transistor T5 is turned on, the output terminal GOUT outputs thelow level received by the second clock signal terminal GB at this phase,for example, the low level is used to control the pixel unit 103 asshown in FIG. 1A to work.

In the third phase t3, as shown in FIG. 1C, the first clock signalterminal CK receives the low-level first clock signal, so that the inputtransistor T1 and the second control transistor T3 are turned on, inthis case, the high level provided by the trigger signal line GSTV istransmitted to the first node N1 and the third node N3, therefore theoutput transistor T5 and the first control transistor T2 are turned off.The second clock signal terminal CB receives a high-level second clocksignal, so that the second noise reduction transistor T7 is turned off.Because the second control transistor T3 is turned on, the low levelprovided by the second power line VGL is transmitted to the second nodeN2 and stored in the first capacitor C1. Therefore, the output controltransistor T4 and the first noise reduction transistor T6 are turned on,and the output terminal GOUT outputs the high level provided by thefirst power line VGH at this phase.

In the fourth phase t4, as shown in FIG. 1C, the first clock signalterminal CK receives the high-level first clock signal, so that theinput transistor T1 and the second control transistor T3 are turned off.The second clock signal terminal CB receives the low-level second clocksignal, so that the second noise reduction transistor T7 is turned on.Because of the storage effect of the second capacitor C2, the level ofthe first node N1 keeps the high level of the previous phase, so thatthe first control transistor T2 and the output transistor T5 are turnedoff. Because of the storage effect of the first capacitor C1, the secondnode N2 continues to maintain the low level of the previous phase, sothat the first noise reduction transistor T6 is turned on, so that thehigh level provided by the first power line VGH is transmitted to thefirst node N1 and the third node N3 through the turned-on first noisereduction transistor T6 and the turned-on second noise reductiontransistor T7, so that the first node N1 and the third node N3 continueto maintain the high level, effectively preventing the output transistorT5 from being turn on, thus avoiding erroneous output.

FIG. 1D is a layout schematic diagram of the shift register unit shownin FIG. 1B on a display substrate. As shown in FIG. 1D, the displaysubstrate includes the input transistor T1, . . . , the voltagestabilization transistor T8, the first capacitor C1 and the secondcapacitor C2 of the shift register unit 104, the first sub-clock signalline GCK and the second sub-clock signal line GCB, the first power lineVGH and the second power line VGL.

For example, as shown in FIG. 1D, the input transistor T1 includes aU-shaped active layer and a linear (I-shaped) gate electrode. The lineargate overlaps with two arms of the U-shaped active layer to realize adouble-gate transistor, and is horizontally arranged with the firstnoise reduction transistor T6 and the second noise reduction transistorT7, so that the arrangement takes up a large space in both thehorizontal direction and the vertical direction of the display panel.The gate electrode of the voltage stabilization transistor T8 and thefirst electrode of the second control transistor T3 are space apart fromeach other at a large distance, and are respectively connected todifferent positions of the second power line VGL, which increases thecomplexity of wire arrangement; the node between the first controltransistor T2 and the second control transistor T3 is connected to thegate electrode of the first noise reduction transistor T6 through a longconnection wire, causing space congestion and so on. Therefore, thearrangement mode and connection mode of the transistors on the displaysubstrate shown in FIG. 1D are easy to cause space congestion, which isnot beneficial to realization of a narrow frame design of the displaypanel, and it is easy to cause signal interference and other problemsdue to excessive parasitic capacitance caused by unnecessary overlap,which affects the display quality of the display panel.

At least one embodiment of the present disclosure provides a displaysubstrate, comprising: a base substrate, and a shift register unit and afirst clock signal line that are on the base substrate; the first clocksignal line extends along a first direction on the base substrate and isconfigured to provide a first clock signal to the shift register unit;the shift register unit comprises an input circuit, an output circuit, afirst control circuit and an output control circuit; the input circuitis configured to input an input signal to a first node in response tothe first clock signal; the output circuit is configured to output anoutput signal to an output terminal; the first control circuit isconfigured to control a level of a second node in response to a level ofthe first node and the first clock signal; the output control circuit isconfigured to control a level of the output terminal under control ofthe level of the second node; the first control circuit comprises afirst control transistor and a second control transistor, an activelayer of the first control transistor and an active layer of the secondcontrol transistor are a continuous control semiconductor layer, thecontrol semiconductor layer extends along the first direction, and agate electrode of the first control transistor and a gate electrode ofthe second control transistor extend along a second direction differentfrom the first direction and are arranged side by side in the firstdirection.

At least one embodiment of the present disclosure provides a displaydevice corresponding to the above-mentioned display substrate, and amanufacturing method of a display substrate.

The display substrate provided by at least one embodiment of the presentdisclosure, the circuit connection and structural layout of the shiftregister unit are optimized, and the length of the shift register unitin the second direction is reduced to a certain extent, which isbeneficial to realizing the narrow frame design of the display panel andensuring the display quality of the display panel.

Embodiments of the present disclosure and some examples thereof will bedescribed in detail with reference to the accompanying drawings. Atleast one embodiment of the present disclosure provides a displaysubstrate. FIG. 2A is a layout schematic diagram of the shift registerunit 104 shown in FIG. 1B on the display substrate.

For example, as shown in FIG. 2A, the display substrate 1 includes: abase substrate 10, a shift register unit 104, a first power line VGH, asecond power line VGL, and a plurality of clock signal lines (forexample, a first sub-clock signal line GCK, a second sub-clock signalline GCB, and a trigger signal line GSTV as shown in the figure) thatare arranged on the base substrate 10. For example, the first power lineVGH, the second power line VGL, and the plurality of clock signal linesextend along a first direction (e.g., the vertical direction shown inFIG. 2A) on the base substrate 10, and are configured to respectivelysupply a first voltage, a second voltage, and a plurality of clocksignals (e.g., the trigger signal, the first clock signal, or the secondclock signal described above, etc.) to the shift register unit 104.

It should be noted that the first power line VGH, the second power lineVGL and the plurality of clock signal lines may be arranged in parallelalong the first direction, or may cross at a certain angle (for example,less than or equal to 20 degrees), the embodiments of the presentdisclosure are not limited to this case.

For example, the first power line VGH is configured to provide a firstvoltage to the plurality of cascaded shift register units 104 includedin the scan driving circuit, and the second power line VGL is configuredto provide a second voltage to the plurality of cascaded shift registerunits 104 included in the scan driving circuit. For example, the firstvoltage is greater than the second voltage, for example, the firstvoltage is at a DC high level and the second voltage is at a DC lowlevel.

For example, the base substrate 10 may be made of, for example, glass,plastic, quartz or other suitable materials, and the embodiments of thepresent disclosure are not limited to this case.

For example, the display substrate 1 includes a pixel array region(i.e., the effective display region 102 shown in FIG. 1A, hereinafterreferred to as the pixel array region 102) and a peripheral regionexcept the pixel array region. For example, the first power line VGH,the second power line VGL, the plurality of clock signal lines and theshift register unit 104 are in the peripheral region and on a side ofthe base substrate 10 (as shown in FIG. 1A, between the pixel arrayregion 102 and a side edge of the base substrate), for example, as shownin FIG. 1A, the plurality of clock signal lines and the shift registerunit 104 are located on the left side of the base substrate, but may belocated on the right side or both of the right side and the left side ofthe base substrate 10, the embodiments of the present disclosure are notlimited to this case.

For example, the second power line VGL and the plurality of clock signallines are on a side of the shift register unit 104 away from the pixelarray region 102, for example, all the second power line VGL and theplurality of clock signal lines are on the left side of the shiftregister unit 104 shown in FIG. 2A, that is, an orthographic projectionof the shift register unit 104 on the base substrate 10 is between thepixel array region 102 and an orthographic projection of a whole of thesecond power line VGL and the plurality of clock signal lines on thebase substrate 10. For example, the first power line VGH is located on aside of the shift register unit 104 close to the pixel array region 102,that is, an orthographic projection of the first power line VGH on thebase substrate 10 is between the pixel array region 102 and theorthographic projection of the shift register unit 104 on the basesubstrate 10.

It should be noted that the above wiring positions are only exemplary,as long as the wiring settings can be satisfied to facilitate theconnection with the shift register unit, the embodiments of the presentdisclosure are not limited to this case.

For example, the pixel array region 102 includes a plurality of pixelunits 103 arranged in an array. For example, each of the plurality ofpixel units 103 includes a pixel circuit, and may further include alight-emitting element (not shown in the figure).

For example, the plurality of cascaded shift register units 104constitute a gate driving circuit. For example, output terminals GOUT ofthe plurality of shift register units 104 are respectively connected togate scanning signal terminals of the pixel circuits in each row of thepixel array region to provide output signals (e.g., gate scanningsignals) to the pixel circuits in each row, thereby driving thelight-emitting elements to emit light. For example, the pixel circuitmay be a pixel circuit in the art including circuit structures such as7T1C, 2T1C, 4T2C, 8T2C, etc., which is not described in detail here.

Only a first stage of shift register unit 104 and a second stage ofshift register unit 104 in the gate driving circuit are shown in FIG.2A. For example, as shown in FIG. 2A, a first clock signal terminal CK(as shown in FIG. 1B) of the first stage of shift register unit 104 isconnected to the second sub-clock signal line GCB to receive a firstclock signal. A second clock signal terminal CB of first stage of shiftregister unit 104 is connected to a first clock signal line GCK toreceive a second clock signal, the first clock signal terminal CK ofsecond stage of shift register unit is connected to the first sub-clocksignal line GCK to receive the first clock signal, the second clocksignal terminal CB of the second stage of shift register unit isconnected to a second sub-clock signal line GCB to receive the secondclock signal, and so on, and the first clock terminal CK of an X-thstage of shift register unit 104 (X is an odd number greater than 1) isconnected to the second sub-clock signal line GCB to receive the firstclock signal, the second clock terminal CB of the X-th stage of shiftregister unit 104 is connected to the first clock signal GCK to receivethe second clock signal, and the first sub-clock signal line GCK of a(X+1)-th stage of shift register unit is connected to the first clocksignal terminal CK to receive the first clock signal, and the secondclock signal terminal CB of the (X+1)-th stage of shift register unit isconnected to the second sub-clock signal line GCB to receive the secondclock signal. It should be noted that the connection mode of therespective stages of shift register units and clock signal lines mayadopt other connection modes in the art, the embodiments of the presentdisclosure are not limited to this case. For example, the input terminalof the first-stage of shift register unit 104 is connected to thetrigger signal line GSTV to receive the trigger signal as the inputsignal, while the input terminal of the second-stage of shift registerunit 104 is connected to the output terminal GOUT of a previous stage ofshift register unit (i.e., the first stage of shift register unit), andthe other stages of shift register units are connected in a similar way.The following description takes the structure of the first stage ofshift register unit as an example, which is not limited to this case inthe embodiments of the present disclosure.

For example, in the example shown in FIG. 2A, because the first clockterminal CK (as shown in FIG. 1B) of the first-stage of shift registerunit 104 is connected to the second sub-clock signal line GCB to receivethe first clock signal, and the second clock signal terminal CB of thefirst-stage of shift register unit 104 is connected to the firstsub-clock signal line GCK to receive the second clock signal, in thisexample, the description takes the case that the second sub-clock signalline GCB is used as the first clock signal line and the first sub-clocksignal line GCK is used as the second clock signal line as an example,and which is not limited to this case in the embodiments of the presentdisclosure.

For example, as shown in FIG. 1B, in some examples, the shift registerunit 104 includes an input circuit 1041, an output circuit 1043, a firstcontrol circuit 1042 and an output control circuit 1044; in otherexamples, the shift register unit 104 further includes a second controlcircuit 1045 and a voltage stabilization circuit 1046.

The input circuit 1041 is configured to input an input signal to a firstnode N1 in response to a first clock signal. For example, the inputcircuit 1041 is connected to an input terminal IN, the first node N1 andthe first clock signal terminal CK, and is configured to be turned onunder control of the first clock signal received by the first clocksignal terminal CK, so that the input terminal IN is connected to thefirst node N1, thereby inputting the input signal to the first node N1.For example, the input circuit 1041 is implemented as theabove-mentioned input transistor T1, and the connection mode of theinput transistor T1 may be referred to the above description, which isnot repeated here.

The output circuit 1043 is configured to output an output signal to anoutput terminal GOUT. For example, the output circuit 1043 is connectedto a third node N3, the output terminal GOUT and the second clock signalterminal CB, and is configured to be turned on under control of a levelof the third node N3, so that the second clock signal terminal CB isconnected to the output terminal GOUT, thereby outputting the secondclock signal at the output terminal GOUT, for example, outputting a lowlevel of the second clock signal. For example, the output circuit 1043is implemented as the output transistor T5 and the second capacitor C2described above, and the connection mode of the output transistor T5 andthe second capacitor C2 may be referred to the above description, whichis not repeated here.

The first control circuit 1042 is configured to control the level of asecond node N2 in response to the level of the first node N1 and thefirst clock signal. For example, the first control circuit is connectedto the first node N1, the second node N2 and the first clock signalterminal CK, and is configured to be turned on under the control of thelevel of the first node N1, so that the second node N2 is connected tothe first clock signal terminal CK, thereby providing the first clocksignal, provided by the first clock signal terminal CK, to the secondnode N2. For example, the first control circuit 1042 is implemented asthe first control transistor T2 and the second control transistor T3described above, and the connection mode of the first control transistorT2 and the second control transistor T3 may be referred to the abovedescription, which is not repeated here. It should be noted that thefirst control circuit 1042 is not limited to being connected to thefirst node N1, and may also be connected to other independent voltageterminals (providing the same voltage as the first node N1) or aseparately set circuit that is the same as the input circuit, theembodiments of the present disclosure are not limited to this case.Other circuits of the shift register unit are connected similarly, whichis not described here.

The output control circuit 1044 is configured to control the level ofthe output terminal GOUT under control of the level of the second nodeN2. For example, the output control circuit 1044 is connected to thesecond node N2, the first power line VGH and the output terminal GOUT,and is configured to connect the output terminal GOUT with the firstpower line VGH under the control of the level of the second node N2, soas to output the first voltage, provided by the first power line VGH, tothe output terminal GOUT to control the output terminal GOUT to be at ahigh level, thereby avoiding erroneous output of the shift register unitin a non-output phase. For example, the output control circuit 1044 isimplemented as the above-mentioned output control transistor T4 and thefirst capacitor C1, and the connection mode of the output controltransistor T4 and the first capacitor C1 may be referred to the abovedescription, which is not repeated here.

The second control circuit 1045 is connected to the first node N1 andthe second node N2, and is configured to control the level of the firstnode N1 under control of the level of the second node N2 and the secondclock signal. The second control circuit 1045 is connected to the firstnode N1, the second node N2, the first power line VGH and the secondclock signal terminal CB, and is configured to be turned on under thecontrol of the level of second node N2 and the second clock signalreceived by the second clock signal terminal CB, so that the first powerline VGH is connected to first node N1, thereby charging the potentialof first node N1 to a high level, thus preventing the output circuit1042 from being turned on in a non-output phase, thus avoiding erroneousoutput. For example, the second control circuit 1045 is implemented asthe first noise reduction transistor T6 and the second noise reductiontransistor T7 described above, and the connection mode of the firstnoise reduction transistor T6 and the second noise reduction transistorT7 may be referred to the above description, and is not described indetail here.

The voltage stabilization circuit 1046 is connected to the first node N1and the third node N3, and is configured to stabilize the level of thethird node N3. For example, the voltage stabilization circuit 1046 isconnected to the first node N1, the third node N3 and the second powerline VGL, and is configured to be turned on under control of the secondvoltage provided by the second power line VGL, so that the first node N1and the third node N3 are connected. For example, the voltagestabilization circuit 1046 is implemented as a voltage stabilizationtransistor T8, and the detailed description may be referred to thedescription of the voltage stabilization transistor T8 in FIG. 1B above,and is repeated here.

For example, the voltage stabilization transistor T8 is always turned onunder the control of the second voltage provided by the second powerline VGL, so that the third node N3 is connected to the first node N1through the voltage stabilization transistor T8, thereby preventing thelevel of the third node N3 from leaking through the input transistor T1,the first control transistor T2 and the second noise reductiontransistor T7 that are connected to the first node N1, and reducing thestress of the level of the third node N3 on the first control transistorT1, thus contributing to maintaining the level of the third node N3 andenabling the output transistor T5 to be turned sufficiently in theoutput stage.

FIG. 3A, FIG. 4A, FIG. 5A and FIG. 6A respectively show planar views ofwiring layers of the shift register unit of the display substrate asshown in FIG. 2A; FIG. 3B, FIG. 4B, FIG. 5B, and FIG. 6B respectivelyshow planar views of wiring layers of the shift register unit of thedisplay substrate as shown in FIG. 2B. FIG. 3A and FIG. 3B are planarviews of a semiconductor layer of the display substrate provided by atleast one embodiment of the present disclosure, FIG. 4A and FIG. 4B areplanar views of a first conductive layer of the display substrateprovided by at least one embodiment of the present disclosure, FIG. 5Aand FIG. 5B are planar views of a second conductive layer of the displaysubstrate provided by at least one embodiment of the present disclosure,and FIG. 6A and FIG. 6B are planar views of a third conductive layer ofthe display substrate provided by at least one embodiment of the presentdisclosure. FIG. 7A is a cross-sectional view of an example of thedisplay substrate as shown in FIG. 2A; FIG. 7B is a sectional view ofanother example of the display substrate as shown in FIG. 2A taken alonga direction A-A′; and FIG. 7C is a sectional view of an example of thedisplay substrate as shown in FIG. 2B taken along a direction B-B′.

For example, an interlayer insulation layer (e.g., including a firstinsulation layer, a second insulation layer, a third insulation layer,etc.) may be located between the layer structures shown in FIGS. 3A to6A or FIGS. 3B to 6B. For example, the first insulation layer 350 (asshown in FIG. 7A) is located between the semiconductor layer 310 shownin FIG. 3A and the first conductive layer 320 shown in FIG. 4A orbetween the semiconductor layer 310 shown in FIG. 3B and the firstconductive layer 320 shown in FIG. 4B. The second insulation layer 360(as shown in FIG. 7A) is located between the first conductive layer 320shown in FIG. 4A and the second conductive layer 330 shown in FIG. 5A orbetween the first conductive layer 320 shown in FIG. 4B and the secondconductive layer 330 shown in FIG. 5B, and the third insulation layer370 (as shown in FIG. 7A) is located between the second conductive layer330 shown in FIG. 5A and the third conductive layer 340 shown in FIG. 6Aor between the second conductive layer 330 shown in FIG. 5B and thethird conductive layer 340 shown in FIG. 6B.

For example, as shown in FIGS. 7A, 7B and 7C, the display substratefurther includes a fourth insulation layer 380, and the fourthinsulation layer 380 is on the third conductive layer 340 for protectingthe third conductive layer 340.

For example, materials of the first insulation layer 350, the secondinsulation layer 360, the third insulation layer 370, and the fourthinsulation layer 380 may include an inorganic insulation material, suchas SiNx, SiOx, and SiNxOy, or an organic insulation material such asorganic resin, or other suitable materials, which are not limited byembodiments of the present disclosure.

It should be noted that the display substrate shown in FIG. 2A takes thelayout design of the first two stages of shift register units in thescan driving circuit and the first power line, the second power line andthe signal line that are connected to the first two stages of shiftregister units as an example, and the layout embodiments of the otherstages of shift register units may be referred to the layout mode shownin FIG. 2A, which is not described in detail here. Of course, otherlayout modes may also be adopted, which is not limited by theembodiments of the present disclosure. Of course, the rest stages ofshift register units of each scan driving circuit may also be referredto the layout shown in FIG. 2A, and other layout forms may also beadopted, the embodiments of the present disclosure are not limited tothis case.

The display substrate provided by at least one embodiment of the presentdisclosure is described in detail with reference to FIGS. 2A-7C.

For example, the active layers of the input transistor T1, . . . , thevoltage stabilization transistor T8 of the shift register unit 104 shownin FIG. 2A may be formed on the semiconductor layer 310 shown in FIG.3A. The active layers of the input transistor T1, . . . , the voltagestabilization transistor T8 of the shift register unit 104 shown in FIG.2B may be formed on the semiconductor layer 310 shown in FIG. 3B. Thesemiconductor layer 310 may be formed by performing a patterning processusing a semiconductor material. For example, as shown in FIG. 3A andFIG. 3B, the semiconductor layer 310 may be in a shape of a short rod orin a bent shape or in a bent shape with a corner, and may be used tomanufacture the active layers of the above-mentioned input transistorT1, . . . , the voltage stabilization transistor T8. Each active layermay include a source region, a drain region, and a channel regionlocated between the source region and the drain region. For example, thechannel region has semiconductor characteristics; the source region andthe drain region are respectively on two sides of the channel region,and may be doped with impurities, and thus have conductivity. Forexample, the source region is a part of the active layer, the metalelectrode in contact with the source region (e.g., located in the thirdconductive layer 340) corresponds to the source electrode (or a firstelectrode) of the respective transistor, the drain region is a part ofthe active layer, and the metal electrode in contact with the drainregion (e.g., located in the third conductive layer 340) corresponds tothe drain electrode (or a second electrode) of the respectivetransistor. For example, the source region is connected to thecorresponding metal electrode (the first electrode) through a via holepenetrating the first insulation layer 350, a second insulation layer360 and a third insulation layer 370, and the drain region is connectedto the corresponding metal electrode (the second electrode) through avia hole penetrating the first insulation layer 350, a second insulationlayer 360 and a third insulation layer 370.

For example, as shown in FIG. 7A, taking the first control transistor T2as an example, the active layer of the first control transistor T2includes a source region S2, a drain region D2 and a channel region P2,and the first control transistor T2 further includes a gate electrodeG2, the gate electrode G2 is in the first conductive layer 320; takingthe first noise reduction transistor T6 as an example, the active layerof the first noise reduction transistor T6 includes a source region S6,a drain region D6 and a channel region P6, and the first noise reductiontransistor T6 further includes a gate electrode G6, the gate electrodeG6 is in the first conductive layer 320, and other transistors aresimilar to this case, and are not described in detail here.

For example, a material of the semiconductor layer 310 may include atleast one selected from a group consisting of oxide semiconductor,organic semiconductor, amorphous silicon, polysilicon, etc. For example,the oxide semiconductor includes metal oxide semiconductor (such asindium gallium zinc oxide (IGZO)), and the polysilicon includeslow-temperature polysilicon or high-temperature polysilicon, theembodiments of the present disclosure are not limited to this case. Itshould be noted that the source region and the drain region can beregions doped with N-type impurities or P-type impurities, theembodiments of the present disclosure are not limited to this case.

It should be noted that in other examples, the first electrode and thesecond electrode of each transistor may be located in other conductivelayers, and are connected to the corresponding active layers through viaholes in the insulation layer between the first electrode/the secondelectrode and the semiconductor layer, the embodiments of the presentdisclosure are not limited to this case.

FIG. 4A and FIG. 4B show the first conductive layer 320 of the displaysubstrate, the first conductive layer 320 is disposed on the firstinsulation layer so as to be insulated from the semiconductor layer 310.For example, the first conductive layer 320 may include the firstelectrode CE11 of the first capacitor C1 and the first electrode CE12 ofthe second capacitor C2, and the gate electrodes of the inputtransistors T1, . . . , the voltage stabilization transistors T8, andvarious wires (for example, a first connection wire L1 and a thirdconnection wire L2) directly connected to the gate electrodes, and aconnection electrode, and accordingly the first insulation layer alsoserves as the gate insulation layer. As shown in FIG. 4A, the gateelectrodes of the input transistors T1, . . . , the voltagestabilization transistors T8 are parts surrounded by dotted coils, thatis, parts where the semiconductor layer structure of each transistoroverlaps with the wires in the first conductive layer 320.

As shown in FIG. 4B, the first conductive layer 320 may further includean intermediate transfer electrode 11, for example, in this example, theintermediate transfer electrode 11 is integral with the gate electrodeG6 of the first noise reduction transistor T6. For example, in thisexample, the first connection wire L1 may not be in the first conductivelayer 320 shown in FIG. 4B, for example, is in the third conductivelayer 340 shown in FIG. 6B, the embodiments of the present disclosureare not limited to this case, as long as the connection between thetransistors can be realized.

FIG. 5A and FIG. 5B show the second conductive layer 330 of the displaysubstrate, the second conductive layer 330 includes the second electrodeCE21 of the first capacitor C1 and the second electrode CE22 of thesecond capacitor C2. The second electrode CE21 at least partiallyoverlaps with the first electrode CE11 to form the first capacitor C1,and the second electrode CE22 at least partially overlaps with the firstelectrode CE12 to form the second capacitor C2. For example, the secondconductive layer 330 shown in FIG. 5A further includes the intermediatetransfer electrode 11.

For example, the example shown in FIG. 5B is similar to the exampleshown in FIG. 5A, except that the second conductive layer 330 does notinclude the intermediate transfer electrode 11, that is, in the displaysubstrate shown in FIG. 2B, the intermediate transfer electrode 11 maynot be in the second conductive layer 330, for example, is in the firstconductive layer 320 shown in FIG. 4B, the embodiments of the presentdisclosure are not limited to this case.

FIG. 6A and FIG. 6B show the third conductive layer 340 of the firststage of shift register unit and the second stage of shift register unitof the display substrate, and the third conductive layer 340 includes aplurality of signal lines (e.g., the trigger signal line GSTV, the firstsub-clock signal line GCK and the second sub-clock signal lines GCB thatare connected to the input terminal of the first-stage of shift registerunit 104), the first power line VGH, the second power line VGL, areference voltage line Vinit, etc. It should be noted that the thirdconductive layer 340 further includes a first transfer electrode 17, asecond transfer electrode 18, a third transfer electrode 16, a signalinput electrode 13, a second connection wire (including a firstconnection sub-wire L3 and a second connection sub-wire L4), a fourthconnection wire L5, and so on.

As shown in FIG. 2A to FIG. 6B, the plurality of signal lines, the firstpower line VGH and the second power line VGL are connected totransistors and capacitors in other layers required to be connectedthrough at least one via hole as shown in FIG. 5C or FIG. 5D, and thetransistors and capacitors are also connected through at least one viahole or bridged by a transition electrode, which is not described indetail here.

For example, a material of the third conductive layer 340 may includetitanium, titanium alloy, aluminum, aluminum alloy, copper, copper alloyor any other suitable composite material, the embodiments of the presentdisclosure are not limited to this case. For example, materials of thefirst conductive layer 320 and the second conductive layer 330 may bethe same as the material of the third conductive layer 340, which is notdescribed in detail here.

FIG. 2A is a schematic diagram of the stacked positional relationship ofthe semiconductor layer 310 shown in FIG. 3A, the first conductive layer320 shown in FIG. 4A, the second conductive layer 330 shown in FIG. 5Aand the third conductive layer 340 shown in FIG. 6A. FIG. 2B is aschematic diagram of the stacked positional relationship of thesemiconductor layer 310 shown in FIG. 3B, the first conductive layer 320shown in FIG. 4B, the second conductive layer 330 shown in FIG. 5B andthe third conductive layer 340 shown in FIG. 6B.

As shown in FIG. 2A, FIG. 3A, FIG. 2B, and FIG. 3B, in at least oneexample, the active layer of the input transistor T1 is in a strip shapeextending along a second direction, and the second direction isdifferent from the first direction. For example, an included anglebetween the first direction and the second direction is between 70° and90° which includes 70° and 90°. For example, the included angle betweenthe first direction and the second direction is 70°, 90°, 80°, etc.,which can be set according to the actual situation, and the embodimentsof the present disclosure are not limited to these cases. For example,in some examples, the channel region of the active layer of the inputtransistor T1 is I-shaped on the base substrate 10, and a channel lengthdirection of the channel region is the second direction (for example,the transverse direction in the figure) perpendicular to the firstdirection, of course, the embodiments of the present disclosure are notlimited to this case, as long as the length of the display panel in thefirst direction can be shortened. For example, the channel lengthdirection is a direction in which carriers flow from the first electrodeof the input transistor T1 to the second electrode of the inputtransistor T1; two parallel (and electrically connected to each other,for example) gate electrodes respectively overlap with the strip-shapedactive layer (I-shaped active layer) of the input transistor T1, therebyobtaining an I-shaped double-gate transistor. Of course, it is may bethat a single gate electrode overlaps with the strip-shaped active layerof the input transistor T1, the embodiments of the present disclosureare not limited to this case.

Because the active layer of the input transistor T1 (it should be notedthat the overall shape of the active layer of the input transistor T1)is changed from the U-shaped structure shown in FIG. 1D to a strip shapeextending along the second direction (for example, an I-shaped structureextending along the second direction, for example, a structure in ashape of “—”), so that the length of the display panel in the firstdirection can be shortened, that is, the vertical height of the displaypanel, which is beneficial to the arrangement of other transistors underthe input transistor T1.

For example, as shown in FIG. 3A or FIG. 3B, the active layer of thefirst noise reduction transistor T6 and the active layer of the secondnoise reduction transistor T7 are constituted by a continuous noisereduction semiconductor layer A11 (that is, the active layer of thefirst noise reduction transistor T6 and the active layer of the secondnoise reduction transistor T7 are integral), and the continuous noisereduction semiconductor layer A11 extends along the first direction andis arranged side by side with the active layer of the input transistorT1 in the first direction. For example, the active layer of the inputtransistor T1 is on an imaginary line on which the active layer of thefirst noise reduction transistor T6 and the active layer of the secondnoise reduction transistor T7 extend along the first direction.

For example, as shown in FIGS. 2A, 2B and 3A, the active layer of thefirst noise reduction transistor T6 may partially overlap (as shown inFIG. 2A and FIG. 3A) with or completely overlap (as shown in FIG. 2B andFIG. 3B) with the active layer of the second noise reduction transistorT7 in the first direction, that is, the active layer of the first noisereduction transistor T6 may be on an imaginary line on which the activelayer of the second noise reduction transistor T7 extends along thefirst direction. The active layer of the first noise reductiontransistor T6 may not overlap with the active layer of the second noisereduction transistor T7 in the first direction, for example, as shown inFIG. 2A and FIG. 3A, the active layer of the first noise reductiontransistor T6 may also be offset from the active layer of the secondnoise reduction transistor T7 by a certain distance in the firstdirection, as long as the arrangement of other structures is notaffected and the width of the shift register unit is excessivelyincreased, and as long as the first noise reduction transistor T6 andthe second noise reduction transistor T7 are located below the inputtransistor T1 in the first direction, no limitation is imposed to thisin the embodiments of the present disclosure.

In the embodiment of the present disclosure, the input transistor T1,the first noise reduction transistor T6 and the second noise reductiontransistor T7 are changed from the horizontally arranged structure inFIG. 1D to the vertically listed structure, which can reduce the widthof the peripheral region of the display panel along the seconddirection, for example, the horizontal width shown in FIG. 1A, which isbeneficial to the realization of the narrow frame design of the displaypanel.

For example, the gate electrode of the first noise reduction transistorT6 and the gate electrode of the second noise reduction transistor T7extend along the second direction and are arranged side by side in thefirst direction. For example, the gate electrode of the first noisereduction transistor T6 and the gate electrode of the second noisereduction transistor T7 may be parallel with each other, for example,both extends along the second direction, or the extension direction ofthe gate electrode of the first noise reduction transistor T6 and theextension direction of the gate electrode of the second noise reductiontransistor T7 may not be parallel with each other, for example,intersect with each other at a certain intersection angle, for example,the intersection angle is less than or equal to 20°, or an angle betweenthe two and a horizontal line is less than or equal to 20°, theembodiments of the present disclosure are not limited to this case, aslong as the first noise reduction transistor T6 and the second noisereduction transistor T7 are integrally provided and arranged up and downalong the first direction.

For example, the first electrode of the input transistor T1, the gateelectrode of the first control transistor T2, the first electrode of thesecond noise reduction transistor T7 and the below-described secondelectrode of the voltage stabilization transistor T8 are all connectedto the first node N1. For example, the first electrode of the inputtransistor T1, the gate electrode of the first control transistor T2,and the first electrode of the second noise reduction transistor T7 areconnected through via holes. The second node N2 is connected to the gateelectrode of the first noise reduction transistor T6, the gate electrodeof the output control transistor T4, the first electrode of the firstcontrol transistor T2, the first electrode of the first capacitor C1 andthe first electrode of the second control transistor T3. For example, asshown in FIG. 2A, the gate electrode of the first noise reductiontransistor T6, the gate electrode of the output control transistor T4,the first electrode of the first control transistor T2, the firstelectrode of the first capacitor C1 and the first electrode of thesecond control transistor T3 are connected through via holes. The thirdnode N3 is connected to the first electrode of the voltage stabilizationtransistor T8, the gate electrode of the output transistor T5 and thefirst electrode of the second capacitor C2. For example, the firstelectrode of the voltage stabilization transistor T8, the gate electrodeof the output transistor T5 and the first electrode of the secondcapacitor C2 are connected through via holes.

For example, as shown in FIG. 6A, the shift register unit furtherincludes a first transfer electrode 17, a second transfer electrode 18and a third transfer electrode 16.

For example, the first transfer electrode 17 is connected to the firstelectrode of the input transistor T1, the gate electrode of the firstcontrol transistor T2, the second electrode of the voltage stabilizationtransistor T8, and the first electrode of the second noise reductiontransistor T7. For example, the first transfer electrode 17 is connectedto the gate electrode of the first control transistor T2 through a viahole penetrating through the second insulation layer 360 and the thirdinsulation layer 370, the first transfer electrode 17 is in a same layeras the first electrode of the input transistor T1, the second electrodeof the voltage stabilization transistor T8, and the first electrode ofthe second noise reduction transistor T7 (for example, all in the thirdconductive layer 340) and is integral with the first electrode of theinput transistor T1, the second electrode of the voltage stabilizationtransistor T8, and the first electrode of the second noise reductiontransistor T7. For example, the first node N1 includes a first transferelectrode 17, that is, the first transfer electrode 17 serves as thefirst node N1 which connects the corresponding electrodes of the inputtransistor T1, the first control transistor T2, the voltagestabilization transistor T8 and the second noise reduction transistorT7.

For example, the first transfer electrode 17 is a fold line which isbetween the group of the first control transistor T2, the second controltransistor T3, the voltage stabilization transistor T8, and the group ofthe first noise reduction transistor T6 and the second noise reductiontransistor T7, and extends along the first direction in a bent shape,and a starting point of the first transfer electrode 17 is the firstelectrode of the input transistor T1, and an ending point of the firsttransfer electrode 17 is the first electrode of the second noisereduction transistor T7. Because the first noise reduction transistor T6and the second noise reduction transistor T7 are arranged side by sidewith the input transistor T1 along the first direction, and the firstcontrol transistor T2 and the second control transistor T3 are alsoarranged side by side along the first direction, that is, a distancebetween a whole of the first noise reduction transistor T6 and thesecond noise reduction transistor T7 and a whole of the first controltransistor T2 and the second control transistor T3 is small, so that anextension length of the first transfer electrode 17 in the firstdirection is larger than an extension length of the first transferelectrode 17 in the second direction, thus shortening the length of thefirst transfer electrode 17 connecting these transistors and the widthof the first transfer electrode 17 in the second direction, which isbeneficial to the realization of a narrow frame.

For example, the second transfer electrode 18 is connected to the firstelectrode of the voltage stabilization transistor T8 and the gateelectrode of the output transistor T5. For example, the second transferelectrode 18 is connected to the gate electrode of the output transistorT5 through a via hole penetrating through the second insulation layer360 and the third insulation layer 370, and the second transferelectrode 18 and the first electrode of the voltage stabilizationtransistor T8 are in a same layer (for example, both are in the thirdconductive layer 340) and are integral. For example, the third node N3includes the second transfer electrode 18, that is, the second transferelectrode 18 serves as the third node N3 which connects the voltagestabilization transistor T8 and the output transistor T5.

For example, as shown in FIG. 4A, the input transistor T1 includes afirst gate electrode G1, a second gate electrode G1′, and connectionelectrodes (G11-G13) connecting the first gate electrode G1 and thesecond gate electrode G1′. The connection electrodes (G11-G13) are in asame layer as the first gate electrode G1 and the second gate electrodeG1′, and include a first part G11 that extends along the first direction(e.g., the vertical direction as shown in FIG. 4A) and is connected tothe first gate electrode G1, and a second part G12 connected to thesecond gate electrode G1′, and a third part that extends along thesecond direction (e.g., the horizontal direction as shown in FIG. 4A)and connects the first part G11 and the second part G12, the first gateelectrode G1 and the second gate electrode G1′ of the input transistorT1 are connected to a first clock signal line providing the first clocksignal through the third part G13 of the connection electrode to receivethe first clock signal.

For example, the first gate electrode G1 and the second gate electrodeG1′ are first connected together by the connection electrodes (G11-G13),and then connected to the first clock signal line. For example, the gateelectrode of the input transistor T1 and the gate electrode of thesecond control transistor T3 may also be connected together andintegrally connected to the first clock signal line, for example, theconnection mode shown in FIG. 1D is adopted, the embodiments of thepresent disclosure are not limited to this case.

For example, as shown in FIG. 2A, for the first-stage of shift registerunit, the first clock signal line providing the first clock signal isthe second sub-clock signal line GCB, and for the second stage of shiftregister unit, the first clock signal line providing the first clocksignal is the first sub-clock signal line GCK, the embodiments of thepresent disclosure are not limited to this case.

For example, in some examples, the second electrode of the active layerof the first control transistor T2 may be directly connected to thesecond sub-clock signal line GCB through a wire. For example, as shownin FIG. 6A, in some other examples, the shift register unit furtherincludes a transfer electrode 15. In this example, the second electrodeof the first control transistor T2 is not directly connected to thesecond sub-clock signal line GCB through a wire, but may be connected tothe third part G13 of the connection electrode through the transferelectrode 15 to be connected to the second sub-clock signal line GCB atthe same time as the third part G13 of the connection electrode toreceive the first clock signal. Embodiments of the present disclosureare not limited to this case.

For example, the active layer of the input transistor T1 is connected tothe signal input electrode through the first connection wire L1extending along the second direction to receive the input signal; thesignal input electrode serves as the input terminal IN of the shiftregister unit 104, for example, is the signal input electrode 13 locatedin the third conductive layer shown in FIG. 6A. For example, the signalinput electrode 13 may be a separately provided electrode, for example,as shown in the third conductive layer of the first stage of shiftregister unit shown in FIG. 6A, or an extension region of the secondelectrode of the output transistor T5 (the second electrode of theoutput transistor T5 serves as the output terminal GOUT of the outputcircuit 1043) serves as the signal input electrode 13, for example, thesecond electrode of the output transistor T5 of the current stage ofshift register unit (i.e., the metal electrode connected to the drainregion of the active layer of the output transistor T5) serves as theoutput terminal GOUT of the output circuit 1043, and is connected to thesignal input electrode of a next stage of shift register unit (e.g., thesecond stage of shift register unit) adjacent to the shift register unit(e.g., the first stage of shift register unit) to serves as the inputsignal of the next stage of shift register unit, the embodiments of thepresent disclosure are not limited to this case.

For example, as shown in FIG. 2A, FIG. 4A and FIG. 6A, the shiftregister unit further includes a wire transfer electrode 12. Forexample, the wire transfer electrode 12 is in the third conductive layer340. For example, the wire transfer electrode 12 and the active layer ofthe input transistor T1 are located in different layers, for example,the first electrode of the input transistor T1 is electrically connectedto a first end 121 of the wire transfer electrode 12, for example, thefirst electrode of the input transistor T1 is located in a same layer asthe wire transfer electrode 12 and is integral with the wire transferelectrode 12. For example, the source region of the active layer of theinput transistor T1 is connected to the first electrode of the inputtransistor T1 through a via hole penetrating through the firstinsulation layer 350, the second insulation layer 360 and the thirdinsulation layer 370, a second end 122 of the wire transfer electrode 12is connected to a first end L11 of a first connection wire L1 (locatedin the first conductive layer 320 shown in FIG. 4A), that extends alongthe second direction and is in a different layer from the wire transferelectrode 12, through a via hole penetrating the second insulation layer360 and the third insulation layer 370, and a second end L12, whichextends along the second direction, of the first connection wire L1 isconnected to the signal input electrode 13 (located in the thirdconductive layer 340) that is in a different layer from the firstconnection wire L1 through a via hole penetrating the second insulationlayer 360 and the third insulation layer 370, so as to realize theconnection between the input transistor T1 and the input terminal IN.For example, the wire transfer electrode 12 and the signal inputelectrode 13 are in a same layer.

For example, as shown in FIG. 2B and FIG. 6B, the first connection wireL1 may also be formed in the third conductive layer 340, and directlyconnected to the wire transfer electrode 12 and the signal inputelectrode 13 (i.e., not connected through a via hole), that is, integralwith the wire transfer electrode 12 and the signal input electrode 13,the embodiments of the present disclosure are not limited to this case,as long as the connection between the input transistor T1 and the signalinput electrode 13 can be realized.

For example, in some embodiments of the present disclosure, the activelayer of the first control transistor T2 and the active layer of thesecond control transistor T3 are formed by a continuous controlsemiconductor layer A12, and the control semiconductor layer A12 extendsalong the first direction, and the gate electrode of the first controltransistor T2 and the gate electrode of the second control transistor T3extend along the second direction and overlap with each other in thefirst direction, that is, the gate electrode of the first controltransistor T2 and the gate electrode of the second control transistor T3are arranged up and down along the first conductive layer 320. It shouldbe noted that A11 and A12 are named as different semiconductor layersfor clarity and conciseness, but the noise reduction semiconductor layerA11 and the control semiconductor layer A12 are both located in the samesemiconductor layer 330 shown in FIG. 3A or FIG. 3B.

For example, as shown in FIG. 2A and FIG. 4A, an orthographic projectionof the second control transistor T3 on the base substrate 10 and anorthographic projection of the first control transistor T2 on the basesubstrate 10 are respectively located on two sides of a secondconnection sub-wire L4 in the first direction. Of course, the extensiondirection of the gate electrode of the first control transistor T2 andthe extension direction of the gate electrode of the second controltransistor T3 may not be parallel with each other, for example,intersect at a certain angle, for example, an intersection angle of thetwo is less than or equal to 20°, or each of angles respectively betweenthe two and the horizontal line is less than or equal to 20°, theembodiments of the present disclosure are not limited to this case.

For example, as shown in FIGS. 2A and 2B, 3A and 3B, the active layer ofthe first control transistor T2 may partially overlap (as shown in FIGS.2A and 3A) or completely overlap (not shown in the figure) with theactive layer of the second control transistor T3 in the first direction,that is, the active layer of the first control transistor T2 may be onan imaginary line on which the active layer of the second controltransistor T3 extends along the first direction. The active layer of thefirst control transistor T2 may not overlap with the active layer of thesecond control transistor T3 in the first direction, for example, asshown in FIGS. 2A and 3A, the active layer of the first controltransistor T2 is offset from the active layer of the second controltransistor T3 by a certain distance in the first direction as long asthe arrangement of other structures is not affected and the width of theshift register unit is excessively increased, and as long as the activelayer of the first control transistor T2 and the active layer of thesecond control transistor T3 are located below the input transistor T1in the first direction, the embodiments of the present disclosure arenot limited to this case.

For example, the active layer of the first control transistor T2, theactive layer of the second control transistor T2, and the active layerof the input transistor T1 are arranged side by side in the seconddirection. For example, in some examples, the active layer of the firstcontrol transistor T2 and the active layer of the second controltransistor T3 intersect with an imaginary line on which the active layerof the input transistor T1 extend along the second direction. That is,the active layer of the first control transistor T2 and the active layerof the second control transistor T3 are on an imaginary line on whichthe active layer of the input transistor T1 extends along the seconddirection. For example, in the embodiments of the present disclosure, nolimitation is imposed to transistors other than the first controltransistor T2 and the second control transistor T3 in the shift registerunit as long as the connection relationship of the circuits can besatisfied.

Therefore, in the embodiments of the present disclosure, the arrangementmode of the first control transistor T2 and the second controltransistor T3 is changed from the structure arranged left and rightalong the second direction shown in FIG. 1D to the structure arranged upand down along the first direction, which can reduce the horizontalwidth of the peripheral region of the display panel and the distancebetween the transistors to the signal line and the second power line,thus facilitating the realization of the narrow frame design of thedisplay panel.

For example, in some embodiments of the present disclosure, the activelayer of the input transistor T1 is further on an imaginary line onwhich the active layer of the first noise reduction transistor T6 andthe active layer of the second noise reduction transistor T7 extendalong the first direction, a whole of the active layer of the firstcontrol transistor T2 and the active layer of the second controltransistor T3 a whole of the active layer of the first noise reductiontransistor T6 and the active layer of the second noise reductiontransistor T7 are oppositely arranged side by side in the seconddirection, thus reducing a distance between a whole of the active layerof the first control transistor T2 and the active layer of the secondcontrol transistor T3 and a whole of the active layer of the first noisereduction transistor T6 and the active layer of the second noisereduction transistor T7.

For example, in some examples, the shift register unit further includesan intermediate transfer electrode 11. The gate electrode of the firstnoise reduction transistor T6 is connected to the first electrode of thefirst control transistor T2 and the first electrode of the secondcontrol transistor T3 through the intermediate transfer electrode 11that is in the second conductive layer 330 shown in FIG. 5A and thesecond connection sub-wire L4 in FIG. 6A, that is, the gate electrode ofthe first noise reduction transistor T6 is connected to a part betweenthe active layer of the first control transistor T2 and the active layerof the second control transistor T3. An orthographic projection of theintermediate transfer electrode 11 on the base substrate 10 does notoverlap with that of the active layer of the first control transistor T2and the active layer of the second control transistor T3 in the firstdirection, that is, the orthographic projection of the intermediatetransfer electrode 11 on the base substrate 10 is between theorthographic projection of the active layer of the first controltransistor T2 and of the active layer of the second control transistorT3 on the base substrate 10 and an orthographic projection of the firstnoise reduction transistor T6 on the base substrate 10.

Therefore, in the embodiment of the present disclosure, the arrangementmode of the first control transistor T2 and the second controltransistor T3 is changed from the structure arranged left and right inthe second direction shown in FIG. 1D to the structure arranged up anddown in the first direction shown in FIG. 2A, and the arrangement modeand positions of the input transistor T1, the first noise reductiontransistor T6 and the second noise reduction transistor T7 are alsochanged to a structure arranged up and down in the first direction,thereby shortening the distance between the orthographic projection ofthe first noise reduction transistor T6 on the base substrate 10 and theorthographic projection of the first control transistor T2 and thesecond control transistor T3 on the base substrate 10, greatlyshortening the length of the wire connecting the gate electrode of thefirst noise reduction transistor T6 with the first control transistor T2and the second control transistor T3 (i.e., the intermediate transferelectrode 11), and largely optimizing the problem of space congestioncaused by dense and long wires.

For example, in some examples, the connection mode of the intermediatetransfer electrode 11 is as shown in FIG. 7A or FIG. 7B. For example, inthis example, the intermediate transfer electrode 11 is in the secondconductive layer 11. For example, as shown in FIG. 7A, the firstinsulation layer 350 is located between the active layer of the firstnoise reduction transistor T6 (for example, in the semiconductor layer310 including the source region S6, the drain region D6 and the channelregion P6) and the gate electrode G6 of the first noise reductiontransistor T6 in the direction perpendicular to the base substrate 10;the second insulation layer 360 is located between the gate electrode G6of the first noise reduction transistor T6 and the intermediate transferelectrode 11 in the direction perpendicular to the base substrate 10.

For example, as shown in FIG. 7A, in some examples, the gate electrodeof the first noise reduction transistor T6 is connected to a first end111 of the intermediate transfer electrode 11 through a via hole H22penetrating the second insulation layer 360, the first electrode S21 ofthe first control transistor T2 is in a same layer as the intermediatetransfer electrode 11, and is connected to a second end 112 of theintermediate transfer electrode 11, that is, the intermediate transferelectrode 11 is integral with the first electrode S21 of the firstcontrol transistor T2, thus realizing the connection between the gateelectrode of the first noise reduction transistor T6 and the firstelectrode of the first control transistor T2. The first electrode S21 ofthat first control transistor T2 is connected to the source region S2 ofthe active layer of the first control transistor T2 (i.e., the firstelectrode of the first control transistor T2) through a via hole H11passing through the first insulation layer 350 and the second insulationlayer 360. For example, in some examples, the second node N2 includesthe intermediate transfer electrode 11. It should be noted that, for thesake of clarity and conciseness, FIG. 7A only shows that the firstelectrode S21 of the first control transistor T2 is connected to thesecond end 112 of the intermediate transfer electrode 11, because thefirst electrode of the first control transistor T2 is connected to thefirst electrode of the second control transistor T3, the first electrodeof the second control transistor T3 is also connected to the second end112 of the intermediate transfer electrode 11, which is not limited bythe embodiments of the present disclosure. The following embodiments arethe same and are not described again.

For example, as shown in FIGS. 5C and 7B, in other examples, the shiftregister unit 104 further includes a second connection wire, forexample, the second connection wire includes a first connection sub-wireL3 and a second connection sub-wire L4. For example, the thirdinsulation layer 370 is located between the intermediate transferelectrode 11 and the second connection wire L3/L4 in the directionperpendicular to the base substrate 10.

For example, the gate electrode G6 of the first noise reductiontransistor T6 is connected to the first connection sub-wire L3 through avia hole H4 penetrating the second insulation layer 360 and the thirdinsulation layer 370, and the first end 111 of the intermediate transferelectrode 11 is connected to the first connection sub-wire L3 through avia hole H3 penetrating the third insulation layer 370.

For example, the source region S2 of the active layer of the firstcontrol transistor T2 is connected to the first electrode S21 of thefirst control transistor T2 through a via hole H1 penetrating throughthe first insulation layer 350, the second insulation layer 360 and thethird insulation layer 370; the first electrode S21 of the first controltransistor T2 is connected to the second connection sub-wire L4, and thesecond connection sub-wire L4 is in a same layer as the first electrodeS21 of the first control transistor T2 and is integral with the firstelectrode S21 of the first control transistor T2. The second end of theintermediate transfer electrode 11 is connected to the second connectionsub-wire L4 through a via hole H2 penetrating through the thirdinsulation layer 370, thereby realizing the connection between the gateelectrode of the first noise reduction transistor T6 and the firstelectrode of the first control transistor T2.

For example, in this example, the second node N2 includes theintermediate transfer electrode 11 and the second connection wire.

For example, in other examples, the second connection wire only includesthe first connection sub-wire L3 or the second connection sub-wire L4.For example, in the example shown in FIG. 2B and FIG. 7C, the case thatthe second connection wire only includes the second connection sub-wireL4 is taken as an example, but the embodiments of the present disclosureare not limited to this case.

For example, as shown in FIG. 5C and FIG. 7C, in this example, theintermediate transfer electrode 11 may be located in the firstconductive layer 320 and integral with the gate electrode of the firstnoise reduction transistor T6.

For example, as shown in FIG. 7C, the source region S2 of the activelayer of the first control transistor T2 is connected to the firstelectrode S21 of the first control transistor T2 through the via hole H1penetrating the first insulation layer 350, the second insulation layer360 and the third insulation layer 370; the first electrode S21 of thefirst control transistor T2 is connected to the second connectionsub-wire L4, the first electrode S21 of the first control transistor T2is located in a same layer as the second connection sub-wire L4 and isintegral with the second connection sub-wire L4, and the second end 112of the intermediate transfer electrode 11 is connected to the secondconnection sub-wire L4 through the via hole H2 passing through the thirdinsulation layer 370, thereby realizing the connection between the gateelectrode of the first noise reduction transistor T6 and the firstelectrode of the first control transistor T2.

For example, in this example, the second node N2 includes theintermediate transfer electrode 11 and the second connection sub-wireL4.

For example, as shown in FIG. 6A, the second power line VGL includes aprotrusion portion 14 protruding in the second direction. The activelayer of the voltage stabilization transistor T8 is located between theactive layer of the second control transistor T3 and the active layer ofthe second noise reduction transistor T7 in the second direction, andthe second electrode of the second control transistor T3 and the gateelectrode of the voltage stabilization transistor T8 are both connectedto the protrusion portion 14 of the second power line VGL. For example,the second electrode of the second control transistor T3 is in a samelayer as the protrusion portion 14 on the second power line VGL and isintegral with the protrusion portion 14, the gate electrode of thevoltage stabilization transistor T8 is connected to the protrusionportion 14 on the second power line VGL which is not in the same layeras the gate electrode of the voltage stabilization transistor T8, forexample, through a via hole penetrating through the second insulationlayer 360 and the third insulation layer 370 to receive the secondvoltage; for example, the via hole for connecting the second electrodeof the second control transistor T3 and the drain region of the activelayer of the second control transistor T3 and the via hole forconnecting the gate electrode of the voltage stabilization transistor T8and the protrusion portion 14 respectively overlap with different sidesof the protrusion portion 14 (for example, they respectively overlapwith an upper side and a lower side of the protrusion portion 14 in thefirst direction as shown in FIG. 2A), for example, they are located atdifferent opposite corners of the protrusion portion 14 (for example,they overlap with an upper left corner and a lower right corner of theprotrusion portion 14 in the first direction as shown in FIG. 2A).

In the embodiments of the present disclosure, the first controltransistor T2 and the second control transistor T3 are arranged up anddown in the first direction as shown in FIG. 2A instead of beingarranged side by side in the second direction as shown in FIG. 1D, sothat the width of the peripheral region of the display panel in thesecond direction can be reduced, and thus the distances between othertransistors (for example, the voltage stabilization transistor T8) andthe second power line VGL can be shortened, moreover, because the secondelectrode (e.g., the source electrode) of the second control transistorT3 and the gate electrode of the voltage stabilization transistor T8 areboth connected to the protrusion portion 14 on the second power lineVGL, thus the second electrode of the second control transistor T3 andthe gate electrode of the voltage stabilization transistor T8 are closerto each other in space, thereby reducing the wire length andfacilitating the realization of the narrow frame of the display panel.

For example, as shown in FIG. 2A and FIG. 5A, the first electrode CE11of the first capacitor C1 and the second electrode CE12 of the firstcapacitor C1 respectively include a notch, and the signal inputelectrode 13 connected to the first connection wire L1 extending alongthe second direction is formed in the notch of the first capacitor C1.For example, an orthographic projection of the signal input electrode 13on the base substrate falls into an orthographic projection of the notchof the first capacitor C1 on the base substrate, so that the shape ofthe first electrode CE11 and the shape of the second electrode CE12 ofthe first capacitor C1 are complementary to the shape of signal inputelectrode 13, which enables to the full use of the space on the displaysubstrate, thus facilitating the realization of the narrow frame designof the display panel.

It should be noted that although the shape of the first capacitor C1 ischanged, the size of the first capacitor C1 generally cannot be changed,and for example, the size change of the first capacitor C1 may fluctuateby 10%˜20% up and down, and the specific shape of the first capacitor C1may be designed and arranged according to other structures, theembodiments of the present disclosure are not limited to this case.

For example, as shown in FIG. 2A and FIG. 4A, an orthographic projectionof the third connection wire L2 (located in the first conductive layer320) connecting the clock signal line (e.g., the first sub-clock signalline GCK) providing the second clock signal and the gate electrode ofthe second noise reduction transistor T7 on the base substrate 10overlaps with an orthographic projection of the active layer of thesecond noise reduction transistor T7 on the base substrate 10 in thefirst direction, and is at least partially parallel to the gateelectrode of the second noise reduction transistor T7. That is, thethird connection wire L2 passes through on a side of the active layer ofthe second noise reduction transistor T7 away from the signal line (forexample, the right side of the active layer of the second noisereduction transistor T7 as shown in FIG. 2A).

For example, as shown in FIG. 2A and FIG. 4A, the third connection wireL2 includes a third sub-connection wire L21 and a fourth sub-connectionwire L22. The third sub-connection wire L21 extends along the firstdirection, and the orthographic projection of the third sub-connectionwire L21 on the base substrate 10 and the orthographic projection of theactive layer of the second noise reduction transistor T7 on the basesubstrate 10 are arranged side by side in the second direction, thefourth sub-connection wire L22 is connected to the third sub-connectionwire L21, and extends along the second direction.

For example, in some examples, as shown in FIG. 4A, the third connectionwire L2 is a gate line, that is, the third sub-connection wire L21 andthe fourth sub-connection wire L22 are directly connected to each other(no via hole is required to realize the connection) and are integralwith each other. For example, the fourth sub-connection wire L22 isconnected to the first sub-clock signal line GCK that provides thesecond clock signal. For example, in another example, as shown in FIG.4B, the third connection wire L2 includes two gate lines connected toeach other through a via hole, one is the third sub-connection wire L21and the other is the fourth sub-connection wire L22. The connectionrelationship between the third sub-connection wire L21 and the fourthsub-connection wire L22 is described in detail below.

For example, the third sub-connection wire L21 connecting the fourthsub-connection wire L22 with the gate electrode of the second noisereduction transistor T7 is also connected to the first electrode of theoutput transistor T5, which is not in a same layer as the thirdsub-connection wire L21, through a via hole, so as to connect the firstelectrode of the output transistor T5 to the second clock signalterminal CB, for example, the second clock signal terminal CB isconnected to the first sub-clock signal line GCK. For example, the firstelectrode of the output transistor T5 is electrically connected to thethird sub-connection wire L21, and the third sub-connection wire L21 islocated on a side of the active layer of the second noise reductiontransistor T7 close to the output transistor T5. For example, anorthographic projection of this via hole on the base substrate 10 isbetween an orthographic projection of the active layer of the secondnoise reduction transistor T7 on the base substrate 10 and anorthographic projection of the active layer of the output transistor T5on the base substrate 10. For example, the fourth sub-connection wireL22 is in the first conductive layer 320, and an orthographic projectionof the fourth sub-connection wire L22 on the base substrate 10 isbetween an orthographic projection of the voltage stabilizationtransistor T8 of the X-th stage of shift register unit on the basesubstrate 10 and an orthographic projection of the input transistor T1of the (X+1)-th stage of shift register unit on the base substrate 10.

For example, the gate electrode of the output transistor T5 iselectrically connected to the first electrode of the voltagestabilization transistor T8, and the second electrode of the outputtransistor T5 is connected to the output terminal GOUT.

For example, in some examples, as shown in FIG. 2A, FIG. 4A, FIG. 5C andFIG. 7D, the first electrode S51 of the output transistor T5 isconnected to the source region S5 of the output transistor T5 through avia hole H7 penetrating through the first insulation layer 350, thesecond insulation layer 360 and the third insulation layer 370, and thefirst electrode S51 of the output transistor T5 is connected to thefourth connection wire L5, for example, the first electrode S51 of theoutput transistor T5 and the fourth connection wire L5 are in a samelayer and are integral with each other, the fourth connection wire L5 isconnected to the third sub-connection wire L21 through a via hole H5 anda via hole H6 that penetrate through the second insulation layer 360 andthe third insulation layer 370, and the third sub-connection wire L21 isconnected to the gate electrode of the second noise reduction transistorT7 and the fourth sub-connection wire L22, so that the first electrodeS51 of the output transistor T5 is connected to the gate electrode G7 ofthe second noise reduction transistor T7, and the first electrode S51 ofthe output transistor T5 and the gate electrode G7 of the second noisereduction transistor T7 are both connected to the first sub-clock signalline GCK to receive the second clock signal.

For example, in some other examples, as shown in FIG. 2B, FIG. 4B, FIG.5D, FIG. 6B and FIG. 7E, the first electrode of the output transistor T5is connected to the fourth connection wire L5, the first electrode S51of the output transistor T5 is connected to the fourth connection wireL5, the first end L51 of the fourth connection wire L5 is connected tothe third sub-connection wire L21 located in the second conductive layer320 through a via hole H8 and a via hole H9 that penetrate the secondinsulation layer 360 and the third insulation layer 370, the second endL52 of the fourth connection wire 15 is connected to the fourthsub-connection wire L22 located in the second conductive layer 320through a via hole H5 and a via hole H6 that penetrate the secondinsulation layer 360 and the third insulation layer 370, the thirdsub-connection wire L21 is directly connected to and integral with thegate electrode G7 of the second noise reduction transistor T7, so thatthe first electrode of the output transistor T5 is connected to the gateelectrode G7 of the second noise reduction transistor T7, and the firstelectrode of the output transistor T5 and the gate electrode G7 of thesecond noise reduction transistor T7 are both connected to the firstsub-clock signal line GCK through the fourth connection wire L5 and thefourth sub-connection wire L22 to receive the second clock signal.

For example, as shown in FIG. 2A, FIG. 3A and FIG. 4A, the active layerof the output control transistor T4 and the active layer of the outputtransistor T5 are formed by a first output semiconductor layer A13 and asecond output semiconductor layer A14 (i.e., the active layer of theoutput control transistor T4 and the active layer of the outputtransistor T5 are integral) and extend along the first direction. Forexample, the active layer of the output control transistor T4 is locatedon an imaginary line on which the active layer of the output transistorT5 extends along the first direction. For example, the active layer ofthe output control transistor T4 includes an upper part of the thirdsemiconductor layer A13 and an upper part of the fourth semiconductorlayer A14 that extend along the first direction, and the active layer ofthe output transistor T5 includes a lower part of the thirdsemiconductor layer A13 and an lower part of the fourth semiconductorlayer A14 that extend along the first direction. It should be noted thatthe ratio of the active layer of the output control transistor T4 andthe active layer of the output transistor T5 to the third semiconductorlayer A13 and the fourth semiconductor layer A14, respectively, can beset according to the actual situation, the embodiments of the presentdisclosure are not limited to this case. For example, the gate electrodeof the output control transistor T4 and the gate electrode of the outputtransistor T5 extend along the second direction and overlap with eachother in the first direction, that is, the output control transistor T4and the output transistor T5 are arranged up and down along the firstdirection. For example, the gate electrode of the output controltransistor T4 is located on an imaginary line of the gate electrode ofthe output transistor T5 in the first direction. For example, the firstelectrode of the output control transistor T4 is electrically connectedto the first power line VGH.

In at least one embodiment of the present disclosure, compared with thecase that two sides of the second noise reduction transistor T7 are bothprovided with the connection wires shown in FIG. 1D, changing thearrangement of the connection wires of the second noise reductiontransistor T7 provided by at least one embodiment of the presentdisclosure (i.e., the wires only pass between the output transistor T5and the second noise reduction transistor T7) reduces the complexity ofwires, avoids the problem of space congestion, and is beneficial torealizing the narrow frame design of the display panel.

For example, in some embodiments of the present disclosure, the wirewidth of each layer of wires is generally 3 microns, and for example, aninterval between adjacent wires in a same layer is greater than 3microns. For example, the interval between adjacent wires is related tothe accuracy of the exposure machine. The higher the accuracy of theexposure machine, the smaller the interval can be, which may bedetermined according to the actual situation, and the embodiments of thepresent disclosure are not limited to this case. In at least oneembodiment of the present disclosure, necessary an interval must bereserved between the adjacent wires in a same layer to avoid wireadhesion and signal short circuit in the actual process.

A distance between an orthographic projection of each wire of the firstconductive layer 320 on the base substrate 10 and an orthographicprojection of each wire of the second conductive layer 330 on the basesubstrate 10 is generally 1.5 microns, for example, the gate electrodeof the transistor in the first conductive layer 320 exceeds the activelayer of the first conductive layer 320 that is on the semiconductorlayer 31 by more than 2 microns. For example, as shown in FIG. 2A, FIG.3, and FIG. 4, the U-shaped double gate electrode of the firsttransistor T1 exceeds the strip-shaped active layer of the firsttransistor T1 by more than 2 microns in the first direction at both twosides of the strip-shaped active layer of the first transistor T1, forexample, a length of parts of the U-shaped double gate electrode of thefirst transistor T1 (for example, a first part G11 and a second partG12) that do not overlap with the strip-shaped active layer of the firsttransistor T1 in the first direction is more than 2 microns, which isnot limited to the case in the embodiments of the present disclosure.

For example, the interval between orthographic projection of the activelayers of adjacent transistors in the semiconductor layer 310 on thebase substrate 10 and the interval between orthographic projections ofadjacent gate lines in the first conductive layer 320 on the basesubstrate 10 is more than 1.5 microns, so that the channel effect amongthe gate lines and the active layers of the transistors in thesemiconductor layer 310 can be avoided. For example, an interval betweenan orthographic projection of the semiconductor layer 310 on the basesubstrate 10 and an orthographic projection of the second conductivelayer 330 on the base substrate 10 is unlimited, and the two may overlapwith each other. For example, in some embodiments of the presentdisclosure, a certain interval is reserved as far as possible betweendifferent layers of wires (this interval is smaller than that betweenadjacent wires in a same layer), which can reduce unnecessary overlapand avoid interference caused by excessive parasitic capacitance.

For example, the width of each wire of the third conductive layer 340should cover the corresponding via hole in the respective wire, thiswidth may exceed the size of the corresponding via hole (for example,the diameter of the via hole) by more than 1 micron, for example, thesize of the via hole is in a range of 2.0-2.5 microns, and the width ofthe respective wire of the third conductive layer 340 covering the viahole is in a range of 4-5 microns. For example, the wire widths of thewires corresponding to the via holes of the output control transistor T4and the output transistor T5 exceed the respective via holes by 1 micronup and down, for example, are in a range of 4.0-4.5 microns, becausethere are many via holes corresponding to the output control transistorT4 and the output transistor T5, and the widths of the wires connectedto other transistors in the third conductive layer 340 only needs tomeet the requirement of covering the respective via holes by more than 1micron, for example, the wire width between the via holes can besmaller.

For example, intervals among the first sub-clock signal line GCK, thesecond sub-clock signal line GCB, the first power line VGH, the secondpower line VGL, etc., that are located in the third conductive layer340, are more than 3 microns. In order to meet the driving capabilityrequirements, the first sub-clock signal line GCK and the secondsub-clock signal line GCB have a wire width of more than 9 microns, andthe second power line VGL may have a wire width of 6 microns, 9 micronsor 10 microns. The first power line VGH has a wire width of 10 microns,the reference voltage wire Vinit has a wire width of 15 microns, thesecond voltage provided by the second power line VGL is generally −7V,and the reference voltage provided by the reference voltage wire Vinitis −3V, because the reference voltage wire Vinit is required to drivethe whole pixel array of the display panel, and the first power line VGHand the second power line VGL are only required to drive the gatedriving circuits located in the peripheral region of the display panel,therefore the wire width of the reference voltage wire Vinit is largerthan that of the first power line VGH and the second power line VGL.

For example, in some examples, the thickness of the first conductivelayer 320 and the thickness of the second conductive layer 330 is in arange of 2000-300 Angstroms, and the thickness of the third conductivelayer 340 is in a range of 5000-8000 Angstroms, the embodiments of thepresent disclosure are not limited to this case.

For example, in some embodiments of the present disclosure, theprotrusion portion is provided on the second power line VGL in order toshorten the connection wire connecting the gate electrode of the voltagestabilization transistor T8 and the active layer of the second controltransistor T3. If the active layer of the second control transistor T3is too long, the doped conductor resistance will be larger. For example,in some embodiments of the present disclosure, the shape of the wire ofthe first node N1 in the third conductive layer 340 (i.e., theintermediate transfer electrode 11) is designed so as not to overlapwith orthographic projections of the wires or electrodes of other layerson the base substrate 10 as much as possible, and is arranged at aposition in the interval (gap) between the wires, thereby avoidingcrosstalk caused by overlapping wires.

It should be noted that in at least one embodiment of the presentdisclosure, for example, the first transfer electrode 17, the secondtransfer electrode 18 and the third transfer electrode 16 are in thethird conductive layer 340. For example, the first transfer electrode 17is an electrode for connecting the input transistor T1, the firstcontrol transistor T2, the second noise reduction transistor T7 and thevoltage stabilization transistor T8 shown in FIG. 1B, for example, thefirst node N1 includes the first transfer electrode 17. For example, thesecond transfer electrode 18 is an electrode for connecting the voltagestabilization transistor T8 and the output transistor T5, and the thirdnode N3 includes the second transfer electrode 18. For example, theintermediate transfer electrode 11 is an electrode for connecting thefirst control transistor T2, the second control transistor T3 and thefirst noise reduction transistor T6, and may be located in the secondconductive layer 330 or the first conductive layer 320. In the case thatthe intermediate transfer electrode 11 is located in the secondconductive layer 330 and adopts the connection mode shown in FIG. 7B,the second node N2 includes the intermediate transfer electrode 11 andthe third sub-connection wire L3 and the fourth sub-connection wire L4that are in the third conductive layer 340 and are connected to theintermediate transfer electrode 11. For example, the wire transferelectrode 12 is located in the first conductive layer 320 and is atransfer electrode connected to the first connection wire L1 located inthe third conductive layer 340, or both the wire transfer electrode 12and the first connection wire L1 are located in a same layer, theembodiments of the present disclosure are not limited to this case.

For example, by arranging the above-mentioned transfer electrodes andconnection wires, problems such as wire adhesion and signal shortcircuit caused by dense wires in a same layer can be avoided. Forexample, the above-mentioned transfer electrodes and connection wiresfunctions as connection or jumper connection.

The optimized circuit connection and structural layout of the shiftregister unit in the display substrate provided by the above embodimentsof the present disclosure reduce the length of the shift register unitto a certain extent, which is beneficial to realize the narrow framedesign of the display panel and ensures the display quality of thedisplay panel at the same time.

At least one embodiment of the present disclosure further provides adisplay device. FIG. 8 is a schematic diagram of a display deviceprovided by at least one embodiment of the present disclosure. As shownin FIG. 8, the display device 2 includes the display substrate 1provided by any one of the embodiments of the present disclosure, forexample, the display substrate 1 shown in FIG. 2A or 2B.

It should be noted that the display device 2 may be any product orcomponent with display function, such as OLED panel, OLED TV, QLEDpanel, QLED TV, mobile phone, tablet computer, notebook computer,digital photo frame, navigator, etc. The display device 2 may alsoinclude other components, such as a data driving circuit, a timingcontroller, etc., and the embodiments of the present disclosure are notlimited to this case.

It should be noted that, in order to be clearly and concisely, theembodiments of the present disclosure do not give all the constituentunits of the display device. In order to realize a substrate function ofthe display device, those skilled in the art can provide and set otherunillustrated structures according to specific needs, the embodiments ofthe present disclosure are not limited to this case.

With regard to the technical effects of the display device 2 provided bythe above embodiments, reference can be made to the technical effects ofthe display substrate 1 provided in the embodiments of the presentdisclosure, which is not repeated here.

At least one embodiment of the present disclosure further provides amanufacturing method of the display substrate. FIG. 9 is a flowchart ofthe manufacturing method of the display substrate provided by at leastone embodiment of the present disclosure. For example, the manufacturingmethod can be used to manufacture the display substrate provided by anyone of the embodiments of the present disclosure. For example, themanufacturing method can be used to manufacture the display substrateshown in FIG. 2A.

As shown in FIG. 9, the manufacturing method of the display substrateincludes steps S110 to S120.

Step S110: providing a base substrate.

Step S120: sequentially forming a semiconductor layer, a firstinsulation layer, a first conductive layer, a second insulation layer, asecond conductive layer, a third insulation layer and a third conductivelayer in a direction perpendicular to the base substrate.

For example, forming the semiconductor layer, the first insulationlayer, the first conductive layer, the second insulation layer, thesecond conductive layer, the third insulation layer and the thirdconductive layer respectively includes forming corresponding materiallayers (e.g., a semiconductor material layer, an insulation materiallayer or a conductive material layer), and then performing a patterningprocess on the material layers to form corresponding pattern structures(e.g., active layers, an electrode patterns, wires, via holes, etc.).The patterning process is, for example, a photolithography process,which includes, for example, coating a photoresist layer on a materiallayer to be patterned, exposing the photoresist layer with a mask,developing the exposed photoresist layer to obtain a photoresistpattern, etching the structural layer with the photoresist pattern, andoptionally removing the photoresist pattern.

For the step S110, for example, the base substrate 10 may be made ofglass, plastic, quartz, or other suitable materials, and the embodimentsof the present disclosure are not limited to this case.

For example, a shift register unit, a first power line, a second powerline, a first clock signal line and a second clock signal line areformed on the base substrate.

For the step S120, for example, forming the shift register unit includessequentially forming a semiconductor layer, a first insulation layer, afirst conductive layer, a second insulation layer, a second conductivelayer, a third insulation layer and a third conductive layer in thedirection perpendicular to the base substrate.

For example, a first power line VGH, a second power line VGL, aplurality of clock signal lines (e.g., a trigger signal line GSTV, afirst sub-clock signal line GCK, a second sub-clock signal line GCB,etc.); the first electrode and the second electrode of each transistorincluded in the shift register unit 104, and connection wires andtransfer electrodes, that connect the transistors and the capacitor, arelocated in the third conductive layer 340, the active layers of thetransistors are located in the semiconductor layer 310, the gateelectrodes of the transistors and the first electrodes of the capacitorsincluded in the shift register unit are located in the first conductivelayer 320, and the second electrodes of the capacitors are formed in thesecond conductive layer 330. Each transistor and each capacitor arerespectively connected to the first power line VGH, the second powerline VGL, the plurality of clock signal lines, and connection wires andtransfer electrodes through via holes penetrating through the firstinsulation layer 310, the second insulation layer 320 or the thirdinsulation layer 330.

With regard to the arrangement of connection structures connecting eachtransistor and capacitor of the shift register unit 104 with the firstpower line VGH, the second power line VGL, the plurality of clock signallines, the connection wires and the transfer electrodes, reference canbe made to the description of FIGS. 2A-7E, which is not repeated here.

It should be noted that, in various embodiments of the presentdisclosure, the flow of the manufacturing method of the displaysubstrate may include more or less operations, these operations may beexecuted sequentially or in parallel. Although the flow of themanufacturing method described above includes a plurality of operationsoccurring in a specific order, it should be clearly understood that theorder of the plurality of operations is not limited to this case. Themanufacturing method described above can be executed once or multipletimes according to predetermined conditions.

With regard to the technical effects of the manufacturing method of thedisplay substrate provided by the above embodiments, reference can bemade to the technical effects of the display substrate provided in theembodiments of the present disclosure, which are not described in detailhere.

The following should be noted:

(1) Only the structures involved in the embodiments of the presentdisclosure are illustrated in the drawings of the embodiments of thepresent disclosure, and other structures can refer to usual designs;

(2) The embodiments and features in the embodiments of the presentdisclosure may be combined in case of no conflict to acquire newembodiments.

What have been described above merely are exemplary embodiments of thepresent disclosure, and not intended to define the scope of the presentdisclosure, and the scope of the present disclosure is determined by theappended claims.

1. A display substrate, comprising: a base substrate, and a shiftregister unit and a first clock signal line that are on the basesubstrate, wherein the first clock signal line extends along a firstdirection on the base substrate and is configured to provide a firstclock signal to the shift register unit; the shift register unitcomprises an input circuit, an output circuit, a first control circuitand an output control circuit; the input circuit is configured to inputan input signal to a first node in response to the first clock signal;the output circuit is configured to output an output signal to an outputterminal; the first control circuit is configured to control a level ofa second node in response to a level of the first node and the firstclock signal; the output control circuit is configured to control alevel of the output terminal under control of the level of the secondnode, wherein the first control circuit comprises a first controltransistor and a second control transistor, an active layer of the firstcontrol transistor and an active layer of the second control transistorare a continuous control semiconductor layer, the control semiconductorlayer extends along the first direction, and a gate electrode of thefirst control transistor and a gate electrode of the second controltransistor extend along a second direction different from the firstdirection and are arranged side by side in the first direction. 2.(canceled)
 3. The display substrate according to claim 1, wherein theshift register unit further comprises a voltage stabilization circuit,the voltage stabilization circuit is connected to the first node and athird node, and is configured to stabilize a level of the third node;the output circuit is connected to the third node, and is configured tooutput the output signal to the output terminal under control of thelevel of the third node.
 4. The display substrate according to claim 3,further comprising a first power line and a second power line that areconfigured to respectively supply a first voltage and a second voltageto the shift register unit, wherein the voltage stabilization circuitcomprises a voltage stabilization transistor, the second power linecomprises a protrusion portion protruding in the second direction; asecond electrode of the second control transistor and a gate electrodeof the voltage stabilization transistor are both connected to theprotrusion portion of the second power line to receive the secondvoltage; and a first electrode of the voltage stabilization transistoris connected to the third node, and a second electrode of the voltagestabilization transistor is connected to the first node.
 5. The displaysubstrate according to claim 1, wherein the input circuit comprises aninput transistor, and an active layer of the input transistor is in astrip shape extending along the second direction; the input transistorcomprises a first gate electrode, a second gate electrode and aconnection electrode connecting the first gate electrode and the secondgate electrode; and the connection electrode comprises a first partwhich is connected to the first gate electrode and extends along thefirst direction, a second part connected to the second gate electrode,and a third part which extends along the second direction and isconnected to the first part and the second part, and the third part ofthe connection electrode is connected to the first clock signal line toreceive the first clock signal, wherein an active layer of the firstcontrol transistor, an active layer of the second control transistor andan active layer of the input transistor are arranged side by side in thesecond direction; the active layer of the first control transistor andthe active layer of the second control transistor are on an imaginaryline on which the active layer of the input transistor extends along thesecond direction; and a first electrode of the input transistor isconnected to a signal input electrode through a first connection wireextending along the second direction to receive the input signal. 6-8.(canceled)
 9. The display substrate according to claim 5, wherein theshift register unit further comprises a wire transfer electrode, whereinthe first electrode of the input transistor is electrically connected toa first end of the wire transfer electrode, the wire transfer electrodeis in a different layer from the active layer of the input transistor,and a second end of the wire transfer electrode is connected to a firstend of the first connection wire, the wire transfer electrode is in adifferent layer from the first connection wire, a second end of thefirst connection wire is electrically connected to the signal inputelectrode, and the wire transfer electrode is in a same layer as thesignal input electrode.
 10. The display substrate according to claim 9,wherein the shift register unit further comprises a first insulationlayer, a second insulation layer, and a third insulation layer, whereinthe first insulation layer is between the active layer of the inputtransistor and the first connection wire, and the second insulationlayer and third insulation layer are between the first connection wireand the wire transfer electrode; and the first electrode of the inputtransistor is in a same layer as the wire transfer electrode, and thesecond end of the wire transfer electrode is connected to the first endof the first connection wire through a via hole penetrating the secondinsulation layer and the third insulation layer, and the second end ofthe first connection wire is electrically connected to the signal inputelectrode through a via hole penetrating the second insulation layer andthe third insulation layer.
 11. The display substrate according to claim5, wherein the display substrate further comprises a second clock signalline configured to provide a second clock signal to the shift registerunit, and the shift register unit further comprises a second controlcircuit; and the second control circuit is connected to the first nodeand the second node, and is configured to control the level of the firstnode under control of the level of the second node and the second clocksignal.
 12. The display substrate according to claim 11, wherein thesecond control circuit comprises a first noise reduction transistor anda second noise reduction transistor; an active layer of the first noisereduction transistor and an active layer of the second noise reductiontransistor are a continuous noise reduction semiconductor layer, and thenoise reduction semiconductor layer extends along the first directionand is arranged side by side with the active layer of the inputtransistor in the first direction; a gate electrode of the first noisereduction transistor and a gate electrode of the second noise reductiontransistor extend along the second direction and are arranged side byside in the first direction; the first electrode of the input transistoris connected to the first node, and the gate electrode of the firstnoise reduction transistor is connected to the second node; and theactive layer of the input transistor is on an imaginary line on whichthe active layer of the first noise reduction transistor and the activelayer of the second noise reduction transistor extend along the firstdirection.
 13. (canceled)
 14. The display substrate according to claim12, wherein in a case where the shift register unit comprises a voltagestabilization transistor, an orthographic projection of an active layerof the voltage stabilization transistor on the base substrate is betweenan orthographic projection of the active layer of the second controltransistor on the base substrate and an orthographic projection of theactive layer of the second noise reduction transistor on the basesubstrate in the first direction.
 15. The display substrate according toclaim 12, wherein the gate electrode of the second noise reductiontransistor is electrically connected to the second clock signal linethrough a third connection wire, the third connection wire comprises athird sub-connection wire and a fourth sub-connection wire, the thirdsub-connection wire is connected to the gate electrode of the secondnoise reduction transistor and extends along the first direction, anorthographic projection of the third sub-connection wire on the basesubstrate and an orthographic projection of the active layer of thesecond noise reduction transistor on the base substrate are arrangedside by side in the second direction, the fourth sub-connection wire isconnected to the third sub-connection wire and the second clock signalline and extends along the second direction, and an orthographicprojection of the fourth sub-connection wire on the base substrate is ata side of an orthographic projection of the active layer of the secondnoise reduction transistor on the base substrate away from anorthographic projection of the of the active layer of the first noisereduction transistor on the base substrate.
 16. The display substrateaccording to claim 15, further comprising a fourth connection wire, afirst insulation layer, a second insulation layer, and a thirdinsulation layer, wherein the first insulation layer is between theactive layer of the input transistor and a gate electrode of the inputtransistor, and the second insulation layer and third insulation layerare between the gate electrode of the input transistor and the fourthconnection wire; and the third sub-connection wire and the fourthsub-connection wire are integral, and the third sub-connection wire isconnected to the fourth connection wire through a via hole penetratingthe second insulation layer and the third insulation layer.
 17. Thedisplay substrate according to claim 15, further comprising a fourthconnection wire, a first insulation layer, a second insulation layer,and a third insulation layer, wherein the first insulation layer isbetween the active layer of the input transistor and a gate electrode ofthe input transistor, and the second insulation layer and thirdinsulation layer are between the gate electrode of the input transistorand the fourth connection wire; and the third sub-connection wire isconnected to the fourth connection wire through a via hole penetratingthe second insulation layer and third insulation layer, and the fourthsub-connection wire is connected to the fourth connection wire through avia hole penetrating the second insulation layer and third insulationlayer.
 18. The display substrate according to claim 12, wherein theshift register unit further comprises an intermediate transferelectrode, wherein the active layer of the first control transistor andthe active layer of the second control transistor are arranged side byside with the active layer of the first noise reduction transistor andthe active layer of the second noise reduction transistor in the seconddirection; an orthographic projection of the intermediate transferelectrode on the base substrate is between a whole of an orthographicprojection of the active layer of the first control transistor on thebase substrate and an orthographic projection of the active layer of thesecond control transistor on the base substrate and a whole of anorthographic projection of the active layer of the first noise reductiontransistor on the base substrate and an orthographic projection of theactive layer of the second noise reduction transistor on the basesubstrate; the gate electrode of the first noise reduction transistor isconnected to a first electrode of the first control transistor and afirst electrode of the second control transistor through theintermediate transfer electrode; and the second node comprises theintermediate transfer electrode.
 19. (canceled)
 20. The displaysubstrate according to claim 18, wherein the shift register unit furthercomprises a first insulation layer and a second insulation layer; thefirst insulation layer is between the active layer of the first noisereduction transistor and the gate electrode of the first noise reductiontransistor in a direction perpendicular to the base substrate; thesecond insulation layer is between the gate electrode of the first noisereduction transistor and the intermediate transfer electrode in thedirection perpendicular to the base substrate; the gate electrode of thefirst noise reduction transistor is connected to a first end of theintermediate transfer electrode through a via hole penetrating thesecond insulation layer; the first electrode of the first controltransistor and the first electrode of the second control transistor areconnected to a second end of the intermediate transfer electrode and ina same layer as the intermediate transfer electrode; and the second nodecomprises the intermediate transfer electrode.
 21. (canceled)
 22. Thedisplay substrate according to claim 18, wherein the shift register unitfurther comprises a first insulation layer, a second insulation layer, athird insulation layer, and a second connection wire; the firstinsulation layer is between the active layer of the first noisereduction transistor and the gate electrode of the first noise reductiontransistor in a direction perpendicular to the base substrate; thesecond insulation layer is between the gate electrode of the first noisereduction transistor and the intermediate transfer electrode in thedirection perpendicular to the base substrate; the third insulationlayer is between the intermediate transfer electrode and the secondconnection wire in the direction perpendicular to the base substrate,and the second connection wire comprises a first sub-connection wire anda second sub-connection wire; the gate electrode of the first noisereduction transistor is connected to the first sub-connection wirethrough a via hole penetrating the second insulation layer and the thirdinsulation layer, and a first end of the intermediate transfer electrodeis connected to the first sub-connection wire through a via holepenetrating the third insulation layer; the first electrode of the firstcontrol transistor and the first electrode of the second controltransistor are connected to the second sub-connection wire and are in asame layer as the second sub-connection wire, and a second end of theintermediate transfer electrode is connected to the secondsub-connection wire through a via hole penetrating the third insulationlayer; and the second node comprises the intermediate transfer electrodeand the second connection wire.
 23. (canceled)
 24. The display substrateaccording to claim 1, wherein a first electrode of the input transistoris connected to a signal input electrode to receive the input signal;the output control circuit comprises an output control transistor and afirst capacitor; and a first electrode of the first capacitor and asecond electrode of the first capacitor respectively comprise a notch,and an orthographic projection of the signal input electrode on the basesubstrate is within an orthographic projection of the notch the firstcapacitor on the base substrate.
 25. The display substrate according toclaim 16, wherein the output circuit comprises an output transistor anda second capacitor, a first electrode of the output transistor isconnected to the fourth connection wire, and the fourth connection wireis connected to the second clock signal line through the thirdconnection wire, and an orthographic projection of the thirdsub-connection wire of the third connection wire on the base substrateis on a side of the orthographic projection of the active layer of thesecond noise reduction transistor on the base substrate close to anorthographic projection of an active layer of the output transistor onthe base substrate; and a shape of the second capacitor is a rectangle.26. (canceled)
 27. The display substrate according to claim 25, whereinin a case where the output control circuit comprises an output controltransistor and a first capacitor, an active layer of the output controltransistor and the active layer of the output transistor are integraland extend along the first direction; a gate electrode of the outputcontrol transistor and the gate electrode of the output transistorextend along the second direction and are arranged side by side in thefirst direction; in a case where the display substrate comprises a firstpower line, a first electrode of the output control transistor iselectrically connected to the first power line to receive a firstvoltage; and the second electrode of the output transistor is connectedto a signal input electrode of a next stage of shift register unitadjacent to the shift register unit.
 28. (canceled)
 29. The displaysubstrate according to claim 1, further comprising a first power line, asecond power line, a second clock signal line, a pixel array region anda peripheral region, wherein the first power line and the second powerline are configured to respectively provide a first voltage and a secondvoltage to the shift register unit; the second clock signal line isconfigured to provide a second clock signal to the shift register unit;the first power line, the second power line, the first clock signalline, the second clock signal line and the shift register unit are inthe peripheral region; orthographic projections of the second powerline, the first clock signal line and the second clock signal line onthe base substrate are on a side of an orthographic projection of theshift register unit on the base substrate away from the pixel arrayregion; and an orthographic projection of the first power line on thebase substrate is on a side of the orthographic projection of the shiftregister unit on the base substrate close to the pixel array region. 30.The display substrate according to claim 1, further comprising a firstpower line, a second control circuit, a voltage stabilization circuit, afirst transfer electrode, a second transfer electrode, and a thirdtransfer electrode, wherein the first power line is configured toprovide a first voltage to the shift register unit; the second controlcircuit is connected to the first node and the second node, and isconfigured to control the level of the first node under control of thelevel of the second node and the second clock signal; the voltagestabilization circuit is connected to the first node and the third node,and is configured to stabilize a level of the third node; the inputcircuit comprises an input transistor, the second control circuitcomprises a first noise reduction transistor and a second noisereduction transistor, the voltage stabilization circuit comprises avoltage stabilization transistor, the output control circuit comprisesan output control transistor and a first capacitor, and the outputcircuit comprises an output transistor and a second capacitor; the firsttransfer electrode is connected to a first electrode of the inputtransistor, a gate electrode of the first control transistor, a secondelectrode of the voltage stabilization transistor and a first electrodeof the second noise reduction transistor, and the first transferelectrode is in a different layer from the gate electrode of the firstcontrol transistor; the second transfer electrode is connected to afirst electrode of the voltage stabilization transistor and a gateelectrode of the output transistor, and the second transfer electrode isin a different layer from the gate electrode of the output transistor;and the third transfer electrode is connected to a first electrode ofthe first noise reduction transistor and a first electrode of the outputcontrol transistor, and is connected to the first power line; and thefirst node comprises the first transfer electrode, and the third nodecomprises the second transfer electrode. 31-35. (canceled)